基于准连续域束缚态介质超表面的光微流折射率传感研究

胡维东; 杜响; 刘思玉; 黄万霞; 石风华; 石建平; 李光元

doi:10.12086/oee.2023.230124

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基于准连续域束缚态介质超表面的光微流折射率传感研究

胡维东^1,2,3,
杜响^1,2,3,
刘思玉^1,2,
黄万霞^1,2,
石风华^1,2,
石建平^1,2, ,,
李光元^3,4, ,

作者信息+

Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface

Hu Weidong^1,2,3,
Du Xiang^1,2,3,
Liu Siyu^1,2,
Huang Wanxia^1,2,
Shi Fenghua^1,2,
Shi Jianping^1,2, ,,
Li Guangyuan^3,4, ,

Author Information+

出版历程 DOI: 10.12086/oee.2023.230124

2023 Vol. 50, No. 9

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摘要

摘要

准连续域束缚态(Quasi-BIC)是超表面中一种特殊共振模，具有极高的品质因子，可以极大地提高光与物质的相互作用，在荧光增强、纳米激光、光传感以及非线性光学等领域均有重要应用。本文基于我们前期对quasi-BIC产生的理论，研究quasi-BIC介质超表面在折射率传感方面的应用。本文给出了传感系统的基本结构，利用电子束光刻技术结合注塑工艺完成了样品光流控结构的制备，并初步测试性能。研究结果表明，得益于产生quasi-BIC的新方法，该超表面具有两个高Q值quasi-BIC共振峰(1.523 µm和1.570 µm，品质因子分别为3069和4071)。以四种折射率溶液(n分别为1.450/1.462/1.470/1.480)为样品的测试实验表明，两个共振峰均能完成折射率检测，灵敏度S分别为452 nm/RIU、428 nm/RIU，性能评价指标FOM分别为376.7、372，优于现有文献；共振波长和折射率之间线性度良好，展现了quasi-BIC超表面在折射率传感中的应用潜力。
关键词
Abstract

The quasi-bound state in the continuum (quasi-BIC) is a special resonant mode in a metasurface with a very high quality factor that can greatly enhance the light-matter interaction and has important applications in fluorescence enhancement, nanolaser, optical sensing, and nonlinear optics. In this paper, we study the application of quasi-BIC dielectric metasurface for refractive index sensing based on the theory generated by our previous quasi-BIC. The basic structure of the sensing device is given, the preparation of the sample optofluidic structure is completed by using electron beam lithography combined with injection molding process, and the performance is initially tested. The results showed that the metasurface has two high-Q quasi-BIC resonance peaks (1.523 µm and 1.570 µm, with quality factors of 3069 and 4071, respectively), thanks to the new strategy of quasi-BIC generation. The test experiments with four refractive index solutions (n=1.450/1.462/1.470/1.480, respectively) as samples showed that both resonance peaks could complete the refractive index detection with the sensitivity of 452 nm/RIU and 428 nm/RIU, respectively, and the performance evaluation indexes FOM were 376.7 and 372, respectively, which are better than the existing literature. The linearity between resonance wavelength and refractive index is good, showing the potential of quasi-BIC metasurface in refractive index sensing.
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1. 引　言

连续域束缚态(BIC)是超表面中一种频率位于辐射连续域内但又被完全束缚、无任何能量泄露的特殊共振模，在理论上具有无穷大的品质因子^[1-2]，可被广泛应用于增强光与物质相互作用的各个领域^[3-5]，如超低阈值激光^[6-7]、低阈值调制器^[8-9]、增强非线性光学效应^[10-12]、增强手性光学响应^[13-14]、超灵敏传感^[15-19]等，近年来已获得了极大的关注。不过，由于理想BIC的共振线宽为零，虽可完美束缚能量但在光谱中却很难观测到，因此需要将BIC转变成准连续域束缚态(quasi-BIC)。目前获得quasi-BIC主要方式是打破纳米颗粒的形状或尺寸对称性^[20-21]，而为了获得超高品质因子，要求不对称因子极小^[22-23]，这对纳米加工提出了极为苛刻的要求，极大地限制quasi-BIC在实际中的应用^[24]。

2022年我们在理论上探讨了一种新的quasi-BIC形成方法，通过调整超表面中纳米颗粒的相对位移来打破晶格单元中的结构对称性，利用表面晶格共振(SLR)杂化获得了4071的超高Q值quasi-BIC^[25]。该方法无需改变纳米粒子尺寸和形状，降低了加工难度，为quasi-BIC的实际应用奠定了条件。

折射率传感可以用来揭示所测样品的流量流速、分子结合或细胞之间的相互作用，尤其是在研究分析物-配体之间相互作用时，无需荧光或酶标记，具有快速实时的特点，在生命科学、药学和临床诊断领域应用十分广泛^[26-27]。近年来已提出多种光学折射率生物传感器的实现方案，如表面等离激元共振传感器^[28-29]、光子晶体传感器^{[15, 30]}、回音壁模式传感器^[31-32]等等。但由于原理限制以及材料中的高光学吸收损耗，传感器的品质因子大多在数十到数百的量级，传感灵敏度(S)和性能评价指标(FOM)较低，很难满足实际检测的需要。

Quasi-BIC具有窄线宽的特点，还可以获得显著的近场增强，从而可以提高光与待检测物之间的相互作用，相互作用越强，灵敏度越高，同时，由于多数quasi-BIC源自局域米氏共振，其增强电场主要束缚在高折射率纳米结构中，在待测物区域的场较弱，导致其传感性能较差，而我们所设计的是源自表面晶格共振(SLR)的非局域的共振quasi-BIC，它继承了SLR的强共振、吸收损耗低、高折射率纳米结构外大范围的极大场增强等优点，通过高Q值和在大范围待测物中的极大场增强，可以有效提高其关键性能参数—传感灵敏度和性能评价指标。因此，本文在利用表面晶格杂化获得双频超高Q值quasi-BIC的理论基础上着重开展了传感应用研究，设计了基于非局域quasi-BIC的全介质超表面光微流折射率传感结构，并利用电子束光刻技术结合注塑工艺制备样品光流控装置，完成初步传感性能测试。实验结果表明：双频共振的灵敏度分别达到452 nm/RIU和428 nm/RIU，性能评价指标分别达到376.7和372，品质因子能够达到1272和1365。相比于其他同类型研究，该结构具有更加优异的传感性能，并且由于这种具有双频共振的结构相比于单频共振能检测的信息更多，在生物传感和环境监测等领域有望获得更为广泛的应用。

2. 传感装置基本结构及原理

所设计的折射率传感装置系统示意图如图1(a)所示，包括激光光源、透射光谱采集系统以及由入液口、出液口、微流腔室、全介质超表面等组成的光流控结构。其中的全介质超表面为核心部分，基本结构如图1(b)所示，在周期性硅纳米柱对阵列中，通过单元中心颗粒的相对位移打破结构的面内对称，表面晶格共振杂化导致在Γ点出现双频电四偶极(EQ)和磁偶极(MD)的quasi-BIC，具有极高的Q因子。同时，这种quasi-BIC的共振峰与介电环境密切相关，当样品进入微流腔后，超表面周围的介质折射率随之改变导致共振峰移动，从而实现折射率传感。

图 1

(a)光流控传感系统示意图; (b)阵列结构俯视图

Figure 1.

(a) Schematic diagram of optofluidic sensing system; (b) Top view of the array structure

下载: 全尺寸图片幻灯片

需要注意的是，超表面的具体参数需要依据表面晶格共振杂化理论详加设计，设计方法和过程可参阅文献[25]。经过优化本文选择的参数为：硅柱直径440 nm，高度100 nm，周期1040 nm，中心纳米柱的y向偏移量为50 nm。对该超表面的光学特性进行理论计算，计算平台采用自制的基于严格耦合波解析法的软件包^[33]。光源选择x-极化线偏振光，从结构上方垂直入射，结果如图2所示。

图 2

(a) n=1.450时超表面的仿真零阶透射谱图(插图为两个共振模式下的电场分布图); (b)不同折射率的仿真透射光谱图

Figure 2.

(a) Simulated zero-order transmission spectrum of the metasurface at n=1.450 (inset is the electric field distribution in the two resonance modes); (b) Simulated transmission spectra at different refractive indices

下载: 全尺寸图片幻灯片

图2(a)计算了当环境折射率为n=1.450时超表面的零阶透射谱。从图中可以看到，在波长1.523 µm和1.570 µm处获得了两个尖锐的共振峰(品质因子Q分别为3069和4071)，这正是quasi-BIC典型的高Q特征。更进一步的理论分析还可以发现，这两个quasi-BIC分别对应于电四偶极EQ模式和磁偶极MD模式。

quasi-BIC除了具有窄线宽的特点，还可以获得显著的近场增强，如图2(a)中的插图所示，从而可以提高光与待检测物之间的相互作用，相互作用越强，灵敏度越高，直观地体现在图2(b)中。图2(b)给出了当环境折射率从1.450增加到1.480时的零阶透射谱。可以明显看出quasi-BIC共振峰的位置与介电环境密切相关，随折射率增大，共振峰逐渐红移，因此可以通过检测透射谱共振峰位移动变化来探测超表面周围介电环境的折射率变化。同时得益于共振峰的高Q值，即使折射率从1.450以0.005的间隔增加到1.480，两个共振峰位移动依然清晰可见，并且移动变化均匀，没有出现任何明显的偏差或异常，与文献[25]结果一致：共振位置与折射率变化是具有良好的线性变化的，可见基于quasi-BIC超表面实现高性能折射率传感是可行的。下面来设计相关实验进行验证。

3. 微流控结构制备

微流控结构的成功制备是保证传感性能的关键，我们分三步来完成。考虑到透光性能和加工条件，结构制备的材料选择以SiO₂和PDMS为主。

1)超表面加工。在SiO₂衬底上加工硅纳米阵列超表面，图3(a)是超表面的加工流程。首先利用PECVD技术在SiO₂衬底上沉积一层100 nm厚的非晶硅薄膜，在采用标准电子束光刻工艺经显影、定影后在正性光刻胶(ZEP520A)上获得设计阵列图形，紧接着在其上采用电子束蒸发镀膜工艺镀40 nm厚Cr膜^[34]，随后去除光刻胶得到Cr柱阵列图形，然后以Cr膜为掩蔽层采用RIE刻蚀得到Si柱阵列。最后得到的Si超表面阵列面积大小为1.2 mm×1.2 mm，高度100 nm。

图 3

(a)硅纳米阵列结构超表面加工流程图; (b)微流腔PDMS注塑工艺流程图; (c)微流控结构实物图

Figure 3.

(a) Flowchart for metasurface fabrication of silicon nanostructure arrays; (b) Flowchart of PDMS injection molding process; (c) Physical diagram of optofluidic sensor

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2)微流腔制备。采用PDMS(聚二甲基硅氧烷)注塑工艺，流程如图3(b)所示。首先，将PDMS和固化剂按比重 10∶1混合倒入烧杯中，充分搅拌后，把带有气泡的PDMS预置体溶液放置于真空干燥箱中进行消泡，再将已制好的模具固定于培养皿中，将消泡后的PDMS溶液倒入培养皿中，直至PDMS溶液完全覆盖模具，紧接着使用加热板进行加热固化，随后将PDMS与模具进行分离脱模，使用打孔器在入液口和出液口位置打穿通孔^[35]。PDMS厚度约成4 mm，腔室容积约1.2 mL。

3)键合。将制备好的微流腔室与超表面对准后键合，并将其在65℃的真空干燥箱内放置 30 min，然后在入液口和出液口插入针管以方便样品注入和去除，最终完成的微流控结构如图3(c)所示。

4. 折射率传感性能测试

依据前述的传感装置基本结构搭建了如图4所示的实验装置。光源采用超连续谱激光器，入射光通过准直镜直入射到微流控结构中的超表面阵列上。微流控结构放置于三维线性平移台上，调整激光垂直入射。使用基于透镜的光纤耦合系统，透射光束由高性能光学光谱分析仪(AQ6370D，Yokogawa)进行采集。购买的折射率匹配液用作标准样品，标准折射率n分别为1.450、1.462、1.470和1.480，通过注射器将不同折射率的液体注射到腔室内，然后测量透射谱。为避免样品交叉影响，每次测量前需要对样品室进行仔细清理，具体过程是先将样品用注射器抽出，然后用丙酮溶液冲洗腔室，再使用乙醇溶液冲洗，反复3次，然后通过光学显微镜检查未发现晶粒或杂质形成才能开始下次实验^[36]。

图 4

(a)实验测试系统示意图; (b)实验测试光学平台

Figure 4.

(a) Schematic diagram of the experimental test system; (b) Experimental test optical platform

下载: 全尺寸图片幻灯片

为与模拟结果对比，首先测试了n=1.450的样品透射谱，结果如图5(a)红线所示。可以看到在波长1.5265 µm和1.569 µm处有明显的共振峰，与仿真计算的位置(1.523 µm和1.570 µm)几乎一致，说明成功激发出了EQ-qBIC和MD-qBIC，也证明了共振杂化实现quasi-BIC的可行性。紧接着测试了3组不同折射率(1.462、1.470、1.480)样品的透射谱，为方便比较，将n=1.450样品也放在一起，如所示。从中可以看到，当样品折射率从1.450增加到1.480时，两个quasi-BIC的共振波长都发生了红移，EQ-qBIC的共振峰从1.5265 μm红移到1.540 μm处，MD-qBIC的共振峰1.569 μm红移到1.582 μm处。灵敏度S可由 ${S}=\Delta \lambda_{\mathrm{QBC}} / \Delta {n}_{\mathrm{sup}}$ 确定，EQ-qBIC的实验S值为452 nm/RI，MD-qBI的实验S值为428 nm/RIU。共振波长与折射率之间具有很好的线性关系，如图5(b)所示，非常有利于传感器的标定和测量。

图 5

(a)不同折射率溶液的实验透射光谱图; (b)共振波长与折射率变化的线性拟合图; (c) EQ-qBIC的实验Q与FOM值; (d) MD-qBIC的实验Q与FOM值

Figure 5.

(a) Experimental transmission spectra of different refractive index solutions; (b) Linear fit of resonance wavelength and refractive index variation; (c) Experimental Q and FOM values for EQ-qBIC; (d) Experimental Q and FOM values for MD-qBIC

下载: 全尺寸图片幻灯片

以折射率n=1.450讨论在实验中品质因子Q的测试结果，n=1.450时，EQ-qBIC的线宽为1.2 nm，MD-qBIC的线宽为1.15 nm，所以EQ-qBIC的实验Q值为1272，MD-qBIC的实验Q值为1365。对于传感性能评价指标(FOM): $F O M=S / \delta \lambda$ ，EQ-qBIC的实验FOM值为376.7，MD-qBIC的实验FOM值为372。表1给出了其他折射率传感文献的灵敏度和性能评价指标，对比可以看出本文结构具有很好的综合表现，这主要得益于新方法产生的quasi-BIC具有极高的Q值。

Comparison of the bulk RI sensing performance

不同折射率传感器性能的比较

References	Structure	Distinction	Sensitivity/(nm/RIU)	FOM
[38]	Asymmetric grooves	Simulation	130	43.3
[39]	Photonic crystal	Simulation	148	821
[15]	Photonic crystal	Experiment	178	445
[40]	Cubes	Experiment	229.4	31.5
[41]	Split-ring disk	Experiment	282	4
[42]	Nano block	Simulation	306.7	10
[43]	Double-gap split-ring	Experiment	379	103
This work	Nano disk arrays	Experiment	452	376.7

下载: 导出CSV

| 显示表格

仿真时采用的是完全理想条件，而本文是实验结果，实验中不可避免地存在加工、材料损耗或周期阵列的尺寸偏差等问题，导致实验中得到的灵敏度和FOM值比仿真差。从实验结果来看，共振峰展宽较多，导致品质因子下降的原因较多，这主要是由于我们所制备的样品室较大，样品溶液除了改变超表面的面内折射率以外，也改变了超表面上方的折射率，同时quasi-BIC与背景之间存在干涉影响，导致实际传感器的灵敏度和FOM值低于文献[25]中的仿真结果，这在后期实验中还需改进。另外，共振峰变得不对称是基于表面晶格共振杂化形成的quasi-BIC表现出非对称的Fano共振线型^[37]。

5. 结　论

本文讨论了基于quasi-BIC全介质超表面的折射率传感原理，给出了光学传感装置的基本结构，加工制备了光学传感装置的核心部件——光微流控结构，初步完成了折射率传感实验。以四种折射率溶液(n分别为1.450/1.462/1.470/1.480)为样品的测试实验中均展现出了良好的传感性能，两个高Q值quasi-BIC共振峰灵敏度分别达到 452 nm/RIU、428 nm/RIU，性能评价指标FOM分别达到376.7、372，与现有基于quasi-BIC的折射率传感器相比性能明显占优，说明quasi-BIC超表面用于折射率传感是可行的。

本文目前只是初步结果，我们相信经过仔细的实验设计，其性能指标还可以进一步提高。我们注意到实验中共振峰的品质因子比理论预测的小了很多，这一方面说明了传感性能还可以进一步挖掘，同时也说明了实验条件和装置设计还需要进一步完善，比如超表面加工、微流腔室的设计、光谱的采集等等。

此外，本文虽然仅展示了所提出的quasi-BIC新型超表面在折射率传感方面的应用，但可以预见的是，由于高Q的存在，本结构在其他需要增强光与物质相互作用的应用领域(比如纳米激光、非线性光学、生化检测)也应有良好的表现，这也是我们下一步的工作重点。

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图 1

(a)光流控传感系统示意图; (b)阵列结构俯视图

Figure 1.

(a) Schematic diagram of optofluidic sensing system; (b) Top view of the array structure

下载: 全尺寸图片幻灯片

图 2

(a) n=1.450时超表面的仿真零阶透射谱图(插图为两个共振模式下的电场分布图); (b)不同折射率的仿真透射光谱图

Figure 2.

下载: 全尺寸图片幻灯片

图 3

(a)硅纳米阵列结构超表面加工流程图; (b)微流腔PDMS注塑工艺流程图; (c)微流控结构实物图

Figure 3.

(a) Flowchart for metasurface fabrication of silicon nanostructure arrays; (b) Flowchart of PDMS injection molding process; (c) Physical diagram of optofluidic sensor

下载: 全尺寸图片幻灯片

图 4

(a)实验测试系统示意图; (b)实验测试光学平台

Figure 4.

(a) Schematic diagram of the experimental test system; (b) Experimental test optical platform

下载: 全尺寸图片幻灯片

图 5

(a)不同折射率溶液的实验透射光谱图; (b)共振波长与折射率变化的线性拟合图; (c) EQ-qBIC的实验Q与FOM值; (d) MD-qBIC的实验Q与FOM值

Figure 5.

下载: 全尺寸图片幻灯片

表 1

不同折射率传感器性能的比较

Table 1

Comparison of the bulk RI sensing performance

References	Structure	Distinction	Sensitivity/(nm/RIU)	FOM
[38]	Asymmetric grooves	Simulation	130	43.3
[39]	Photonic crystal	Simulation	148	821
[15]	Photonic crystal	Experiment	178	445
[40]	Cubes	Experiment	229.4	31.5
[41]	Split-ring disk	Experiment	282	4
[42]	Nano block	Simulation	306.7	10
[43]	Double-gap split-ring	Experiment	379	103
This work	Nano disk arrays	Experiment	452	376.7

下载: 导出CSV

参考文献(43)

参考文献

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DOI: 10.12086/oee.2023.230124

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Citation:
胡维东, 杜响, 刘思玉, 黄万霞, 石风华, 石建平, 李光元. 基于准连续域束缚态介质超表面的光微流折射率传感研究[J]. 光电工程, 2023, 50(9): 230124. DOI: 10.12086/oee.2023.230124

胡维东, 杜响, 刘思玉, 黄万霞, 石风华, 石建平, 李光元. 基于准连续域束缚态介质超表面的光微流折射率传感研究[J]. 光电工程, 2023, 50(9): 230124. DOI: 10.12086/oee.2023.230124

Citation:
Hu Weidong, Du Xiang, Liu Siyu, Huang Wanxia, Shi Fenghua, Shi Jianping, Li Guangyuan. Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface. Opto-Electronic Engineering 50, 230124 (2023). DOI: 10.12086/oee.2023.230124

Hu Weidong, Du Xiang, Liu Siyu, Huang Wanxia, Shi Fenghua, Shi Jianping, Li Guangyuan. Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface. Opto-Electronic Engineering 50, 230124 (2023). DOI: 10.12086/oee.2023.230124

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- 收稿日期 2023-05-25
- 修回日期 2023-07-26
- 录用日期 2023-07-27
- 网络出版日期 2023-09-26
- 刊出日期 2023-11-02
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References	Structure	Distinction	Sensitivity/(nm/RIU)	FOM
[38]	Asymmetric grooves	Simulation	130	43.3
[39]	Photonic crystal	Simulation	148	821
[15]	Photonic crystal	Experiment	178	445
[40]	Cubes	Experiment	229.4	31.5
[41]	Split-ring disk	Experiment	282	4
[42]	Nano block	Simulation	306.7	10
[43]	Double-gap split-ring	Experiment	379	103
This work	Nano disk arrays	Experiment	452	376.7

文章中查看下载

[1]	Hsu C W, Zhen B, Stone A D, et al. Bound states in the continuum[J]. Nat Rev Mater, 2016, 1(9): 16048. DOI: 10.1038/natrevmats.2016.48
[2]	Fang C Z, Yang Q Y, Yuan Q C, et al. High-Q resonances governed by the quasi-bound states in the continuum in all-dielectric metasurfaces[J]. Opto-Electron Adv, 2021, 4(6): 200030. DOI: 10.29026/oea.2021.200030
[3]	Azzam S I, Kildishev A V. Photonic bound states in the continuum: From basics to application[J]. Adv Opt Mater, 2021, 9(1): 2001469. DOI: 10.1002/ADOM.202001469
[4]	Joseph S, Pandey S, Sarkar S, et al. Bound states in the continuum in resonant nanostructures: an overview of engineered materials for tailored applications[J]. Nanophotonics, 2021, 10(17): 4175−4207. DOI: 10.1515/nanoph-2021-0387
[5]	Koshelev K, Bogdanov A, Kivshar Y. Meta-optics and bound states in the continuum[J]. Sci Bull, 2019, 64(12): 793−796. DOI: 10.1016/j.scib.2018.12.003
[6]	Ha S T, Fu Y H, Emani N K, et al. Directional lasing in resonant semiconductor nanoantenna arrays[J]. Nat Nanotechnol, 2018, 13(11): 1042−1047. DOI: 10.1038/s41565-018-0245-5
[7]	Kodigala A, Lepetit T, Gu Q, et al. Lasing action from photonic bound states in continuum[J]. Nature, 2017, 541(7636): 196−199. DOI: 10.1038/nature20799
[8]	戴建明, 张祎帆, 陈宇轩, 等. 液态水辐射源产生太赫兹波的研究进展[J]. 中国激光, 2021, 48(19): 1914003. DOI: 10.3788/CJL202148.1914001 Dai J M, Zhang Y F, Chen Y X, et al. Research progress on Terahertz wave generation from liquid water[J]. Chin J Lasers, 2021, 48(19): 1914003. DOI: 10.3788/CJL202148.1914001
[9]	Xing H Y, Fan J X, Lu D, et al. Terahertz metamaterials for free-space and on-chip applications: From active metadevices to topological photonic crystals[J]. Adv Dev Instrumen, 2022, 2022: 9852503. DOI: 10.34133/2022/9852503
[10]	Carletti L, Koshelev K, De Angelis C, et al. Giant nonlinear response at the nanoscale driven by bound states in the continuum[J]. Phys Rev Lett, 2018, 121(3): 033903. DOI: 10.1103/PhysRevLett.121.033903
[11]	Liu Z J, Wang J Y, Chen B, et al. Giant enhancement of continuous wave second harmonic generation from Few-Layer GaSe coupled to high-Q quasi bound states in the continuum[J]. Nano Lett, 2021, 21(17): 7405−7410. DOI: 10.1021/acs.nanolett.1c01975
[12]	Liu Z J, Xu Y, Lin Y, et al. High-Q quasin bound states in the continuum for nonlinear metasurfaces[J]. Phys Rev Lett, 2019, 123(25): 253901. DOI: 10.1103/PhysRevLett.123.253901
[13]	Chen Y, Du W, Zhang Q, et al. Multidimensional nanoscopic chiroptics[J]. Nat Rev Phys, 2022, 4(2): 113−124. DOI: 10.1038/s42254-021-00391-6
[14]	Luo Y, Chi C, Jiang M J, et al. Plasmonic chiral nanostructures: Chiroptical effects and applications[J]. Adv Opt Mater, 2017, 5(16): 1700040. DOI: 10.1002/adom.201700040
[15]	Romano S, Zito G, Torino S, et al. Label-free sensing of ultralow-weight molecules with all-dielectric metasurfaces supporting bound states in the continuum[J]. Photonics Res, 2018, 6(7): 726−734. DOI: 10.1364/PRJ.6.000726
[16]	Yesilkoy F, Arvelo E R, Jahani Y, et al. Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces[J]. Nat Photonics, 2019, 13(6): 390−396. DOI: 10.1038/s41566-019-0394-6
[17]	Leal-Junior A, Avellar L, Biazi V, et al. Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development[J]. Opto-Electron Adv, 2022, 5(10): 210098. DOI: 10.29026/oea.2022.210098
[18]	Maksimov D N, Gerasimov V S, Romano S, et al. Refractive index sensing with optical bound states in the continuum[J]. Opt Express, 2020, 28(26): 38907−38916. DOI: 10.1364/OE.411749
[19]	Huo Y Y, Zhang X, Yan M, et al. Highly-sensitive sensor based on toroidal dipole governed by bound state in the continuumin dielectric non-coaxial core-shell cylinder[J]. Opt Express, 2022, 30(11): 19030−19041. DOI: 10.1364/OE.456362
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图 1

(a)光流控传感系统示意图; (b)阵列结构俯视图
图 2

(a) n=1.450时超表面的仿真零阶透射谱图(插图为两个共振模式下的电场分布图); (b)不同折射率的仿真透射光谱图
图 3

(a)硅纳米阵列结构超表面加工流程图; (b)微流腔PDMS注塑工艺流程图; (c)微流控结构实物图
图 4

(a)实验测试系统示意图; (b)实验测试光学平台
图 5

(a)不同折射率溶液的实验透射光谱图; (b)共振波长与折射率变化的线性拟合图; (c) EQ-qBIC的实验Q与FOM值; (d) MD-qBIC的实验Q与FOM值

图 1
图 2
图 3
图 4
图 5

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基于准连续域束缚态介质超表面的光微流折射率传感研究

References	Structure	Distinction	Sensitivity/(nm/RIU)	FOM
[38]	Asymmetric grooves	Simulation	130	43.3
[39]	Photonic crystal	Simulation	148	821
[15]	Photonic crystal	Experiment	178	445
[40]	Cubes	Experiment	229.4	31.5
[41]	Split-ring disk	Experiment	282	4
[42]	Nano block	Simulation	306.7	10
[43]	Double-gap split-ring	Experiment	379	103
This work	Nano disk arrays	Experiment	452	376.7

表 1

不同折射率传感器性能的比较

表 1

表 1

基于准连续域束缚态介质超表面的光微流折射率传感研究

Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface

摘要

关键词

Abstract

Keywords