Abstract: In order to realize the high-precision measurement of the thermal expansion coefficient of the infrared material under the cryogenic vacuum environment, a measurement scheme of solid material is proposed. Based on the self-collimation principle, this scheme designs a microstructure, establishes the relationship between structural deformation and angle, and deduces the formula of thermal expansion coefficient measurement. Using the measurement formula, this article analyzes the relationship between the measurement error transfer function of the scheme, and also uses the error sensitivity function to analyze the design accuracy of cryogenic thermal expansion coefficient measuring device for infrared materials, and finally the relative error of the scheme is calculated. The thermal expansion coefficient of the scheme is measured to be only 0.76%, which satisfies the nanometer measurement requirement.