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    • 摘要: 采用光刻胶热熔法制作具有特定尺寸的微透镜,制作的微透镜能将微透镜阵列技术应用于短波1 μm ~3 μm红外探测器中,有效地提高探测器件的光电性能。采用AZ P4620厚光刻胶,利用紫外光刻技术,对透镜制作中的前烘、曝光和显影、坚膜、热熔等工艺进行了深入细致的实验研究,确定了最优的工艺参数,实现了球冠直径在(5.5±0.5) μm,曲率半径3 μm的微透镜,且透镜有很好的均匀性和一致性,满足近红外探测器件的要求。

       

      Abstract: A microlens with a specific size is fabricated by using melting photoresist, and the microlens can be applied to a shortwave 1 μm ~3 μm infrared detector, which can effectively improve the photoelectric performance of the detector. Using AZP4620 thick photoresist and UV lithography technology, the lens production in the soft bake, exposure and development, hardening, hot melt and other processes were carried out in-depth and detailed experimental study was done to determine the optimal process parameters. The micro-lens with a crown diameter of (5.5 ± 0.5) μm and a radius of curvature of 3 μm was realized. The lens has good uniformity and consistency to meet the requirements of near infrared detection device.