Abstract: This paper introduces a transient species generation system based on glow discharge technology. In fields like plasma diagnostics, combustion optimization, and environmental monitoring, quantitative measurement of transient species holds great significance. Although tunable diode laser absorption spectroscopy (TDLAS) can measure transient species with high precision, there is a lack of reliable calibration sources in current applications. This study employed glow discharge technology to construct a multi-component transient species preparation system, achieving controllable generation of various transient species, including nitrogen atoms, oxygen atoms, OH radicals, and excited-state water molecules. TDLAS technology was used to monitor the species and verify the feasibility of spectral calibration. Experimental results show that adjusting the parent molecule pressure and discharge current can widely tune the concentration of transient species, and high signal-to-noise ratio absorption spectra can be obtained for analysis. This research provides reliable calibration sources for TDLAS measurement of transient species, meets the calibration needs in fields such as plasma diagnostics and combustion optimization, and offers a sustained and stable concentration source of transient species for related studies.