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    • 摘要: 静电驱动薄膜变形镜通过静电驱动实现波前像差校正,其校正能力评估主要依赖于驱动载荷分析的准确性。由于电极边缘产生电荷集聚导致区域载荷非线性变化产生非均匀变形,引起静电驱动薄膜变形镜校正面型评估不准或错误评估。基于此,开展静电驱动薄膜变形镜电极边缘效应及其对校正能力评估影响研究,建立电极边缘效应理论模型,并基于该模型对电极边缘形变响应和校正能力评估准确性的影响进行定量分析。分析结果表明,边缘效应前后校正能力评估误差从25.49%降低至6.83%甚至更低,且适用于不同电极间距参数,验证所提理论模型正确性。

       

      Abstract: Electrostatically driven membrane deformable mirrors correct wavefront aberrations through electrostatic forces, whose correction capability dependent on driving load accuracy. Due to the charge aggregation at the electrode edges, non-uniform deformation occurs due to the nonlinear change of the regional load, which causes inaccurate or incorrect assessment of the calibrated wavefront aberration of electrostatically driven membrane deformable mirrors. Based on this, this work carries out a study on electrostatically driven membrane deformable mirror electrode edge effect and its influence on correction capability assessment, establishes a theoretical model of electrode edge effect, and quantitatively analyzes the influence of electrode edge deformation response and correction capability assessment accuracy based on the model, and the results show that before and after the consideration of the edge effect, the error of correction capability assessment is improved from 25.49% to 6.83% or even lower, and applies to different electrode spacing parameters, which verifies the correctness of the theoretical model proposed in this paper.