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    • 摘要: 在扫描相位测量轮廓术中,需要先将不同位置的物体匹配到同一点,再根据相移算法提取相位信息,而像素匹配精度与相移算法均会影响测量精度。为此,采用显微系统,根据其远心光路特性实现物体移动量与像素移动量的等量转换;通过交替采集白场图像和条纹图像,由白场图像通过光流法实现精确的像素匹配,再根据物体匀速运动特点实现条纹图像的精确像素匹配;根据初始条纹周期选择基本符合满周期的N幅条纹图,由任意步数相移方法计算出截断相位分布,再通过概率密度函数搜索最佳条纹周期,进而得到准确的相位信息,完成物体形貌测量。实验表明,所提方法有效提高了测量精度,相移算法也适用于任意N (N≥3)幅图,在模拟工业流水线场景中物体的三维测量时,RMSE (均方根误差)可达0.008 mm左右。

       

      Abstract: In scanning PMP, it is essential to first match different positions of the object to the same point, and then extract phase information using phase-shifting algorithms. Both pixel-matching accuracy and phase-shifting algorithms influence measurement precision. To address this, a microscopic system is employed, leveraging its telecentric optical path characteristics to achieve equal conversion between object displacement and pixel displacement. By alternately capturing white-field and fringe images, precise pixel matching is realized through optical flow in the white-field images, followed by accurate pixel matching of the fringe images based on the object's uniform motion. A set of N fringe images, closely matching a full cycle based on the initial fringe period, is selected to compute the truncated phase distribution using an arbitrary step phase-shifting method. The optimal fringe period is then identified through a probability density function, leading to the accurate extraction of phase information and the completion of the object morphology measurement. Experimental results demonstrate that the proposed method significantly enhances measurement accuracy, with the phase-shifting algorithm applying to any N≥3 images, making it particularly suitable for 3D measurements of objects in industrial production lines, achieving an RMSE measurement accuracy of about 0.008 mm.