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    • 摘要: 面向航空航天等大型复杂机电系统,长度测量的需求从单独的一维位移测量发展到多目标、灵活便于拓展的多路并行测量。调频连续波激光雷达长度测量技术具备抗干扰、精度高、无合作等优势。本文基于调频连续波激光雷达技术开展多路并行相干精密长度测量方法研究,针对传统长度测量系统存在光纤色散、辅助路光纤漂移导致长度测量精度降低问题,提出一种含有氰化氢气体吸收池的三光路马赫-曾德尔干涉测量系统,在此基础上,基于光开关结构实现精密长度多路并行测量。通过精密导轨长度测量实验结果表明,提出的方法在3.6 m长度范围内标准差不超过25 μm,实现了四路并行长度测量。与商用激光干涉仪测量结果比较,多路测量结果的绝对误差不超过30 μm。

       

      Abstract: For large complex electromechanical systems such as aeronautics and astronautics, the demand for length measurement has also evolved from one-dimensional displacement measurement to multi-objective, flexible and extensible multiline parallel measurement. The frequency-modulated continuous-wave lidar length measurement technology has the advantages of anti-interference, high precision and no cooperation. In this paper, a multiline parallel coherent precision length measurement method based on frequency modulation continuous wave laser lidar is studied. To solve the problem of fiber dispersion and auxiliary fiber drift in the traditional length measurement system, a three-channel Mach-Zehnder interferometry system containing a hydrogen cyanide gas absorption cell is proposed. On this basis, the precision length multiline parallel measurement is realized based on the optical switch structure. The experimental results of precision guide rail length measurement show that the proposed method is less than 25 μm in the length range of 3.6 m. The four-way parallel length measurement is realized. The absolute error of the multi-channel measurement results is not more than 30 μm compared with the measurement results of a commercial laser interferometer.