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    • 摘要: 硬脆材料由于具有稳定的机械和化学性能、优良的光电特性等优势,在航空航天、光电工业等领域具有广泛的应用。激光加工由于具有高精度、高能量、非接触式加工等特点,是实现硬脆材料加工的理想技术。为了实现硬脆材料的去除加工,通常需要较高的激光能量,使得加工的结构精度较低,而且表面质量较差。本综述介绍了液体辅助激光加工技术在硬脆材料加工方面的研究进展,分别介绍了液相激光烧蚀、激光诱导背部湿法刻蚀和刻蚀辅助激光改性等三种液体辅助激光加工技术的原理,对比了各自的优势和不足,以及不同加工技术、辅助液体种类以及加工参数等对不同硬脆材料加工质量的影响,介绍了液体辅助激光加工技术目前主要的应用,最后,简要阐述了该技术存在的问题和未来的潜在发展。

       

      Abstract: Due to the stable mechanical and chemical properties, excellent photoelectric properties, and other advantages, hard and brittle materials have been widely used in aerospace, the photoelectric industry, and other fields. Laser fabrication is an ideal technology for hard and brittle materials processing due to its high precision, high energy, and non-contact properties. In order to achieve the removal of hard and brittle materials, high laser energy is usually required, resulting in low structural accuracy and poor surface quality. This review introduces the advances of liquid-assisted laser fabrication technology in the processing of hard and brittle materials, introduces the principles of three liquid-assisted laser fabrication technologies, and compares their advantages and disadvantages. The effects of different processing technologies, types of auxiliary liquids, and processing parameters on the quality of different materials were summarized in detail. The main applications of liquid-assisted laser fabrication technology were summarized, and the existing problems and potential development of this technology were discussed.