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    • 摘要: 基于飞秒激光的双光子聚合(two-photon polymerization, TPP)加工技术一直是三维微纳加工技术中的研究热点。随着生命科学、材料工程、微纳光学等领域对复杂、大面积微型三维器件制备需求的提升,TPP加工效率不足的问题日益严重,加工时间过长不仅造成加工结构的不稳定,更是严重阻碍这些重要三维器件的进一步推广应用。本文以TPP加工效率提升方面的研究工作为主线,分别从单光束刻写、并行多光束刻写、面曝光和体曝光四个方式进行总结与对比,阐述相应的光学系统设计、刻写策略、刻写精度与通量等方面的研究情况,总结各种技术的优势与劣势,同时展望未来发展趋势。

       

      Abstract: Two-photon polymerization (TPP) based on femtosecond laser has been a research hotspot in 3D micro/nano writing technology. With the increasing demand for processing complex and large-scale miniaturized 3D devices in the fields of life science, material engineering, micro and nano optics, and etc., the issue of low processing efficiency of TPP is becoming increasingly serious. During the long fabrication period, many disturbances can be introduced in the processing, causing the quality deterioration of the structure and seriously hindering the further popularization and application of these crucial 3D devices. This paper respectively compares the four approaches of single-beam writing, parallel multi-beam writing, pattern projection, and 3D projection exposure based on the TPP lithography efficiency. Moreover, the researches on the optical design of system, the writing accuracy, the fabrication throughput, the writing strategy, and etc. of each approach are also described. And the advantages and disadvantages of these four methods are summerized simultaneously. Finally, we also made a brief prospect to the developing trend of TPL efficiency improvement in the future.