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    • 摘要: 作为三维超构材料的衍生物,具有亚波长厚度的人工超构表面结构能够在紧凑的平台上灵活操纵光与物质的相互作用,有利于多功能、超紧凑光子器件的研发,对于微纳光子学和集成光子学具有重要意义。铁电晶体铌酸锂凭借其跨越可见光至中红外波段的宽透明窗口以及较大的非线性光学、电光系数,被认为是最有前途的多功能集成光子平台之一。近年来,基于铌酸锂薄膜(lithium-niobate-on-insulator,LNOI)的集成光子学器件研究也得到了迅猛发展。本文总结了几种有潜力制备高质量铌酸锂超构表面的微纳加工技术,同时介绍了近年来铌酸锂超构表面结构的研究进展,并对其未来的研究方向进行了展望。

       

      Abstract: As derivatives of 3D metamaterials, artificial metasurface structures with sub-wavelength thicknesses can flexibly manipulate light-matter interactions in a compact manner, which is beneficial for the fabrication of multi-functional and ultracompact photonic devices. Therefore, metasurface structures are of great significance for micro-nano photonics and integrated photonics. The ferroelectric crystal lithium niobate is regarded as one of the most promising multifunctional integrated photonic platforms due to its wide transparent window spanning from the visible to the mid-infrared band as well as large nonlinear optical and electro-optic coefficients. In recent years, research on integrated photonics devices based on lithium-niobate-on-insulator (LNOI) thin films has also been developed rapidly. In this paper, several micro-nano processing technologies that have the potential to prepare high-quality lithium niobate metasurfaces are summarized. At the same time, the research progress of lithium niobate metasurface structures in recent years is introduced, and its future research directions are prospected.