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    • 摘要: 微孔作为一种常见结构,被广泛应用于生物医疗、航空航天、三维封装等领域。飞秒激光具有的超短脉冲持续时间和超高峰值功率特性使其在高质量微孔加工方面具有独特优势。本文综述了近年来飞秒激光时空整形微孔加工方法及其应用,包括飞秒激光时空整形方法、时域/空域整形的电子动态调控微孔加工以及微孔在增透减反、切割以及油水分离、雾气收集、气体收集等方面的应用,并讨论了时空整形飞秒激光微孔加工目前所面临的挑战和未来研究方向。

       

      Abstract: As a common structure, microholes are widely used in various fields, including biomedical, aerospace, 3D packaging and so on. Femtosecond laser has unique advantages in drilling high-quality microhole due to its ultra-short pulse duration and ultra-high peak power. This review covers temporally/spatially shaped femtosecond laser microhole drilling methods and their applications over the past decade, including femtosecond laser temporally/spatially shaped methods, temporally/spatially shaped femtosecond laser microhole drilling based on electrons dynamics control, and the applications of microhole in transmittance enhancement and anti-reflection, material cutting, oil/water separation, fog collection and gas collection. Furthermore, present challenges and future research opportunities in this field are analyzed.