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    • 摘要: 激光直写是一种高效、可规模化制备柔性电子器件的技术。本文采用激光直写技术在具有良好介电性能的聚酰亚胺薄膜上制备了一种可用于应变传感和湿度传感的柔性环形天线传感器。利用激光碳化聚酰亚胺获得的材料表面呈现多孔及堆叠片层碳结构,当施加于天线上的应变和环境湿度改变时,天线的谐振频率会发生规律变化,进而实现应变和湿度感知。制备的环形天线传感器的应变响应灵敏度为−8.943 kHz/με,湿度响应灵敏度为−6.45 MHz/RH%。采用激光直写技术制备的天线传感器可以广泛应用于结构健康监测等领域。

       

      Abstract: Laser direct writing (LDW) is a highly efficient and scalable technology to fabricate flexible electronic devices. In this work, a type of flexible circle antenna sensor is developed by LDW on polyimide film with good dielectric property in response to strain and humidity. The carbonized polyimide has good conductivity and great adhesion to the substrate, which could be used as the active material for antenna. The carbonized polyimide presents porous stacked carbon structures and has the excellent electrical properties, which facilitate strain sensing and make the antenna have low loss, respectively. The resonance frequency of the LDW-generated antenna sensor changes with the variation of applied strain and environmental humidity. The sensitivities of LDW-generated antenna sensor response to applied strain and humidity are −8.943 kHz/με and −6.45 MHz/RH%, respectively. The flexible antenna sensor prepared by the LDW provides a new possibility for the application of structural health monitoring.