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    • 摘要: 本文总结了当前同步辐射X射线反射镜光学制造技术的需求背景、发展现状以及未来方向。同步辐射光源是国家重大科学装置,作为同步辐射光源重要光学元件的X射线反射镜,直接决定着光学调制品质。短波长掠入射的特殊应用场景,使X射线反射镜有着更为特殊且高精度的面形要求,其加工与检测技术长期为国外所垄断,国内发展较为缓慢,面对国内未来同步辐射装置的建设需求,我国亟需打破这一现状。

       

      Abstract: This article reviews on the fabrication advancement of X-ray reflect mirror fabrication in terms of technical requirements, fabrication and metrology development. Synchrotron radiation source, as a revolutionary light source, provides one of the most high-performance X-ray for scientific research, where reflect mirror plays an essential role in X-ray beam focusing. The short wavelength of X-ray demands reflecting photons only at a grazing angle of incidence on the extremely high-precision and smooth surface. Fabrication of such mirrors requires highly specialized equipment and technology that only a few foreign optic manufacturers possess, whereas manufacturers in China is laggard in this area. It is imperative to develop fabrication capability domestically as two synchrotron radiation facilities are under construction and several more projects are about to launch in the near future in China.