Abstract: A high-precision photoacoustic spectroscopy system for detecting gaseous perfluorocarbons is developed in this paper, aiming to achieve high-precision real-time monitoring of gaseous fluoride. A dedicated detection system for gaseous fluoride was built based on the principle of photoacoustic spectroscopy, and a compact prototype was designed and established for miniaturization and integration. To address the issue of unstable concentration testing caused by light source changes during practical tests, an innovative correction method based on light intensity-sound pressure-concentration is proposed using photodetector feedback. Specifically, a relationship model between light intensity, sound pressure, and concentration was established, and its incorporation into the system significantly improves the detection accuracy of 10⁻⁶-level and long-term stability. To verify its test accuracy, the system was used to detect perfluorocarbons in a simulated industrial production scenario, and anti-interference tests were performed. The results demonstrate that the system exhibits high detection accuracy and good stability in gaseous perfluorocarbons leakage detection, suggesting its potential for application in practical industrial detection.