Dual-layer 3D terahertz metamaterial based multifunctional sensor

Deng Guangsheng; Guo Aoran; Cheng Xinqi; Yang Jun; Cai Fei

doi:10.12086/oee.2024.240164

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Deng G S, Guo A R, Cheng X Q, et al. Dual-layer 3D terahertz metamaterial based multifunctional sensor[J]. Opto-Electron Eng, 2024, 51(10): 240164. doi: 10.12086/oee.2024.240164

Citation:

Deng G S, Guo A R, Cheng X Q, et al. Dual-layer 3D terahertz metamaterial based multifunctional sensor[J]. Opto-Electron Eng, 2024, 51(10): 240164. doi: 10.12086/oee.2024.240164

Dual-layer 3D terahertz metamaterial based multifunctional sensor

1.
Special Display and Imaging Technology Innovation Center of Anhui Province, Academy of Opto-Electronic Technology, Hefei University of Technology, Hefei, Anhui 230009, China
2.
Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui 230009, China

Fund Project: Project supported by National Key Research and Development Program of China (2023YFF0719403), National Natural Science Foundation of China (62001150), and Anhui Provincial Natural Science Foundation (2208085MF160)

More Information

^*Corresponding author: caifei@hfut.edu.cn
CSTR: 32245.14.oee.2024.240164

Received Date 12 July 2024

Revised Date 30 September 2024

Accepted Date 30 September 2024

Published Date 25 October 2024

Abstract

Abstract

The versatility of sensors, as a crucial part of integrated devices, is receiving increasing attention. Here, a terahertz metamaterial multifunctional sensor based on the coupling of a two-layer 3D resonant structure is introduced. The sensor consists of an upper and lower polyimide film substrate, a graphite layer attached to the lower polyimide film substrate, and a periodic double-layer 3D toothed coupling resonant structure between the graphite layer and the upper polyimide film substrate, which consists of a symmetric mountain-shaped structure in the lower layer and a symmetric concave structure in the upper layer. The three-dimensional metamaterial can achieve multifunctional measurements: the refractive index change of the liquid medium can be detected with high sensitivity by measuring the resonant frequency of the structure. Therefore, it is possible to detect the liquid medium with such a design. Meanwhile, in terms of micro displacement sensing, a high micro displacement measurement sensitivity can be realized in both the z-axis and y-axis directions, respectively. The 3D metamaterial sensor proposed in this paper provides an idea for the design of a functionally integrated sensor in the terahertz region.
- three-dimensional metamaterial /
- multifunctional measurement /
- refractive index /
- micro displacement

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References

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Overview

Overview

Sensors are increasingly valued for their versatility as a crucial part of integrated devices. With the advancement of technology facing diverse environmental challenges, there is a growing need for multifunctional integration in the sensing field. Metamaterials are the combination of artificial periodic arrays with subwavelength resonant structures, and terahertz metamaterials sensors have a wide range of applications in biomacromolecule sensing and other trace precision detection fields due to their high penetration, specific fingerprint, low photon energy, high sensitivity and high resolution. At present, researchers in this field are increasingly demanding the highly sensitive performance of metamaterial sensors. Traditional metamaterial sensors have already enabled various sensing applications, but most of these sensors are designed for single detection targets and functions. Integrating sensors with multiple detection functions remains one of the challenges in the current research on metamaterial sensors. Moreover, the existing reported metamaterial sensors are primarily based on two-dimensional metasurfaces. A common issue with these sensors is their relatively low sensitivity and resolution, which limits the application of metamaterial sensors in high-precision detection.

In this paper, a terahertz metamaterial multifunctional sensor based on the coupling of a two-layer 3D resonant structure with high sensitivity is introduced. The sensor consists of an upper and lower polyimide film substrate, a graphite layer attached to the lower polyimide film substrate, and a periodic double-layer 3D toothed coupling resonant structure between the graphite layer and the upper polyimide film substrate, which consists of a symmetric mountain-shaped structure in the lower layer and a symmetric concave structure in the upper layer. The three-dimensional metamaterial can achieve multifunctional measurements with high sensitivity: the refractive index change of the liquid medium can be detected with a high sensitivity by measuring the resonant frequency of the structure. Therefore, it is possible to detect the liquid medium with such a design. Meanwhile, in terms of micro displacement sensing, a high micro displacement measurement sensitivity can be realized in both the z-axis and y-axis directions, respectively. Compared with other reported metamaterial sensors, the proposed design achieves multifunctional sensing ability. Moreover, it also outperforms metamaterial sensors based on two-dimensional metasurfaces in terms of sensitivity and resolution. The 3D metamaterial sensor proposed in this paper paves a new way for the design of functionally integrated sensor with high sensitivity at terahertz frequencies.