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Zhang K, Ma Z J, Zhou Y, et al. Silicon-based super-resolution metalens with weak sidelobe[J]. Opto-Electron Eng, 2022, 49(11): 220258. doi: 10.12086/oee.2022.220258
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Silicon-based super-resolution metalens with weak sidelobe
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Abstract
Metasurface is a spatially varying ultrathin nanostructure that has been widely studied and used in optical super-resolution focusing, either in lenses or in systems. However, with the decrease of the focal spot size of the metalens, large sidelobes are inevitably generated, limiting the field of view and potential applications of the lens. In this paper, a method for producing super-resolution metalens with a large numerical aperture (NA=0.944) and weak sidelobe is presented. For a circularly polarized light with the wavelength of λ=632.8 nm, a super-resolution point-focusing with a weak sidelobe is realized based on PB phase regulation of silica-based metasurface. Experimental results show that the FWHM (full-width at half maximum) of our focusing spot is 0.45λ, which is less than the diffraction limit of 0.53λ (the diffraction limit is 0.5λ/NA), and the sidelobe ratio (SR) is 0.07. Our proposed super-resolution metalens bears the potential to realize the miniaturization, lightweight and integration of super-resolution optical devices or systems.-
Keywords:
- super-resolution /
- weak sidelobe /
- metasurface /
- metalens
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References
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Overview
Optical super-resolution lenses have shown great potential in super-resolution microscopic systems and nano-fabrication systems. With the decrease of the focusing spot of the super-resolution lens, it is inevitable that large sidelobes and sidebands will be generated, which will lead to a limited field of view and imaging artifacts. Therefore, when designing super-resolution optical devices, it is necessary to adopt a balanced strategy between focusing spot and side lobe according to the practical applications. Metasurface is a planar structure composed of nanoscale meta-atoms, which can flexibly regulate the amplitude, phase and polarization of the optical field, being beneficial to construct complex super-resolution optical fields. The PB phase meta-atom is comparatively easy to fabricate due to its simplicity. Using Finite-Difference Time-Domain (FDTD) solutions to optimize the size of the meta-atom, we can get a structure with high transmittance. By rotating the angle of the meta-atom, we can achieve linear phase control. The application of PB phase metasurface has been demonstrated in the field of super-resolution focusing devices with suppressed sidelobe. Based on the vector angular spectrum method and particle swarm optimization (PSO) algorithm, a super-resolution point focusing lens with a large numerical aperture and weak sidelobe is optimally designed with a 32-valued phase control at the wavelength of λ=632.8 nm. Based on the silicon-based PB phase metasurface, our metalens was fabricated by electron beam lithography and orthoplastic etching. The lens radius Rlens=57λ, focal length zf=20λ, corresponding to the numerical aperture of NA=0.944. The optical field distribution of the super-resolution metalens was measured experimentally by a large-numerical-aperture microscopy system. The results show that, at the focal plane, the FWHM of the focal spot is 0.45λ, which is less than the diffraction limit of 0.53λ (the diffraction limit is 0.5λ/NA), the side-lobe ratio SR is 0.07, and the depth of focus is 0.4λ. Our proposed metalens can achieve a small depth of focus, a weak sidelobe ratio, and super-resolution point focusing. Our proposed super-resolution metalens bears the potential to realize the miniaturization, lightweight, and integration of super-resolution optical devices or systems.
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Zhang K, Ma Z J, Zhou Y, et al. Silicon-based super-resolution metalens with weak sidelobe[J]. Opto-Electron Eng, 2022, 49(11): 220258. doi: 10.12086/oee.2022.220258
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Figure 1.
Silicon-based metalens. (a) Schematic diagram of silicon-based metaatoms; (b) Schematic diagram of the focusing
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Figure 2.
Flowchart of the optimization process to achieve super-resolution focusing with weak sidelobes
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Figure 3.
Theoretical results of silicon-based metalens. (a) Two-dimensional intensity distribution in the focal plane; (b) The corresponding intensity curve in the focal plane; (c) Two-dimensional intensity distribution on xz plane; (d) Intensity (red), FWHM (blue), and SR (green) parameter on the xz plane
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Figure 4.
FDTD simulation results of silicon-based metalens. (a) Two-dimensional intensity distribution in focal plane; (b) Focal plane intensity curve; (c) Two-dimensional intensity distribution on xz plane; (d) Focal spot intensity (red), FWHM (blue) and SR (green) parameter curves on the xz plane
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Figure 5.
The SEM and experimental schematic of metalens. (a) The SEM of the metalens; (b) Experimental schematic based on optical microscopy system with a large numerical-aperture objective
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Figure 6.
Experimental results of silicon-based metalens on the focal plane. (a) Two-dimensional intensity distribution on the focal plane; (b) The corresponding intensity curves along the x-axis (green) and y-axis (blue), mean intensity curves (red) and the design results (black)
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Figure 7.
Experimental (red) and design (green) results of silicon-based metalens on the xz plane. (a) Two-dimensional Intensity distribution on the xz plane; (b) The corresponding intensity; (c) FWHM; (d) Sidelobe ratio
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