Applications of vector vortex beams in laser micro-/nanomachining

In the past two decades, numerous significant advances have been achieved in the realm of the vector beams. Considering numerous published reviews already covering diverse topics in terms of generating and/or manipulating unprecedented vector beams, we summarize the typical applications of vector vortex beams in the topics of laser micro-nano processing for material modification, subtractive and additive manufactures. This paper reviews part of the critical advances in fabricating micro-nano structures on the surface and inside the materials, optical information storage and rapid fabrication of microstructures with the stereolithography based-on vector vortex beams. Particular cares are focused on the principles and technologies in applications of patterned laser-induced periodic surface structures and rapid two-photon polymerization of three-dimensional microstructures based on customized vector vortex beams. Finally, we summarize the advantages and challenges of vector vortex beams in laser micro-nano processing, and we also anticipate that more vector light fields will enable more complex applications in the future.