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Mauclair C, Najih B, Comte V et al. Dynamic spatial beam shaping for ultrafast laser processing: a review. Opto-Electron Sci x, 250002 (2025). doi: 10.29026/oes.2025.250002
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Review Open Access
Dynamic spatial beam shaping for ultrafast laser processing: a review
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Abstract
This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators, with a particular focus on liquid crystal-based systems. We discuss phase modulation strategies and highlight the current limitations and challenges in surface and bulk processing. Specifically, we emphasize the delicate balance between high-fidelity beam shaping and energy efficiency, both critical for surface and bulk processing applications. Given the inherent physical limitations of spatial light modulators such as spatial resolution, fill factor, and phase modulation range. We explore techniques developed to bridge the gap between desired intensity distributions and actual experimental beam profiles. We present various laser light modulation technologies and the main algorithmic strategies for obtaining modulation patterns. The paper includes application examples across a wide range of fields, from surgery to surface structuring, cutting, bulk photo-inscription of optical functions, and additive manufacturing, highlighting the significant enhancements in processing speed and precision due to spatial beam shaping. The diverse applications and the technological limitations underscore the need for adapted modulation pattern calculation methods. We discuss several advancements addressing these challenges, involving both experimental and algorithmic developments, including the recent incorporation of artificial intelligence. Additionally, we cover recent progress in phase and pulse front control based on spatial modulators, which introduces an extra control parameter for light excitation with high potential for achieving more controlled processing outcomes. -
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References
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Mauclair C, Najih B, Comte V et al. Dynamic spatial beam shaping for ultrafast laser processing: a review. Opto-Electron Sci x, 250002 (2025). doi: 10.29026/oes.2025.250002
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Figure 1.
Principle of spatial beam shaping of ultrafast laser. A light modulator (transmittive or reflective) is placed on the laser beam path. It imprints a wavefront modulation (modulation mask) that rearranges the laser intensity distribution in a further plane of propagation, usually the focal plane of a converging element. There, a variety of beam distributions can be obtained in he three dimensions, from multi-spot arrangement to continuous beam shapes, as well as non-diffracting beams.
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Figure 2.
Main experimental systems for dynamic wavefront modulation. (a) Spatial light modulators (SLM) are based on a liquid crystal (LC) layer whose molecules can be orientated under an electric field E, permitting to dynamically control the spatial optical retardation of an impinging laser beam. (b) Deformable mirrors (DM) rely on a similar principle with actuators whose controllable height defines the optical retardation on the beam wavefront. They can be membrane-based or segmented. (c) The acousto-optic deflectors (AOD) are based on the generation of sound waves inside a crystal (e.g. TeO2 or PbMoO4). The related periodical variation of refractive index also permits wavefront modulation. (d) The multi-plane light conversion (MPLC) set-up is based on spatial mode conversion through successive passages on specifically designed phase retardation maps. (e) The general phase contrast method (GPC) relies on the principle of phase contrast microscopy where the transparent pure-phase sample corresponds to a controlled phase modulation (applied with an SLM for example) and the phase contrast filter (PCF) is the optical element turning this modulation into an intensity contrast in an imaging plane. See text for more details.
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Figure 3.
Main calculation strategies for determination of the spatial phase modulation ϕM. (a) The iterative fourier transform algorithm (IFTA) based on FFT iterations between the modulation and the shaping planes. (b) The lens and grating (LG) calculation relies on the complex sum of phase masks to generate arrays of laser spots in 3D. (c) The global optimization algorithms encompasses all the strategies that permit to 'guess' the optimal ϕM through stochastic optimization (simulated annealing, evolutionary algorithm etc.) or machine learning strategies (neural network etc.).
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Figure 4.
Surface structuring with dynamic wavefront shaping. (a) Array of impacts on silicon using 15 irradiation steps, the unwanted 0th order leaves a strong crater at the top of the array. (b1) Parallel structuring of tempered glass using an array of 6 laser spots with anti-reflection properties due to the LIPSS (b2). (c) Combination of multispot shaping and beam scanning for stainless steel surface processing conferring friction reduction properties. (d) Reaching more than
1000 laser spots in a single irradiation on glass (Schott B270), note the effect of the unwanted 0th order. (e1) Square top hat beam with corresponding crater on steel (e2). (f1) Shaping of arbitrary intensity distributions with the detrimental speckle effect and its marking on photoresist (f2) with a strong crater at the 0th order position (bottom right). (g1) Fresnel zone plate fabrication by successive shaped beam irradiations (g2) stitched together on Au film on SiO2. Figure reproduced with permission from: (a) ref.37, the author; (b) ref.102, (c) ref.103, under a Creative Commons Attribution License; (d) ref.48, Optical Society of America; (e) ref.35, the author; (f) ref.104, the authors; (g) ref.105, under a Creative Commons Attribution License. -
Figure 5.
Examples of ultrafast laser bulk photoinscription with the help of spatial beam shaping. (a) Structuring of glass at the microscale level using 3D arrays of spots achieved in a single irradiation using LG algorithm including depth-related aberration correction. (b) Photoinscription in glass using the fractional Fourier transform iterative algorithm generating arrays of laser spots in multiple planes. (c) Photo emulsification of the crystalline lens for the cataract surgery with the help of spatial beam shaping of ultrafast laser. (d) Photoinscription of photonic devices inside fused silica with optical functions (here light division). (e) Fabrication of gyroid photonic crystals using wavefront compensation of the depth-related strong spherical aberration in chalcogenide glass generating circular dichroism (RCP: right handed circular polarization). (f) Photonic crystal in lithium niobate with adaptive control of the wavefront to compensate for the spherical aberrations. (g) Structuring of diamond in three dimension yielding conductive wires in the bulk. Figure reproduced with permission from: (a) ref.95, the author; (b) ref.122, the author; (c) ref.9, the author, ref.123, under a Creative Commons Attribution License; (d) ref.124, Optical Society of America; (e) ref.125, the author; (f) ref.126, the author; (g) ref.95,127, the author.
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Figure 6.
Surface and bulk structuring towards the sub micrometric scale using non-diffractive beams with the help of spatial beam shaping. (a) Bessel beam generation and high aspect ratio structuring of glass with single femtosecond pulses. (b) Turning non diffractive beam (or Airy beam) enabling curved machining of silicon. (c) Hollow core non-diffractive beam based on vortex phase modulation yielding tubular bulk photo inscription in a single irradiation. (d) Modulated axiconic phase mask forming a multiple lobes non diffractive beam permitting dynamic crack orientation control for glass cutting. (e) Drilling of stainless steel using non-diffractive beam with enhanced efficacy. (f) Machining of grooves using superimposed bessel beams associating an axicon and an SLM. Figure reproduced with permission from: (a) ref.137, the author, ref.138, under a Creative Commons Attribution License; (b) ref.139, the author; (c) ref.140, under a Creative Commons Attribution License; (d) ref.141, SPIE; (e) ref.142, under a Creative Commons Attribution License; (f) ref.143, the author.
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Figure 7.
Spatial beam shaping with polarization control to achieve nanometric structuring. (a) Helical wavefront shaping using an SLM associated with an S-waveplate yielding a vortex beam generating spiral orientation of LIPSS on metal. (b) Array of laser spots with individual polarization control. The laser-induced surface tracks show the corresponding LIPSS orientation. (c) Example of integrated advanced dynamic polarization control using a single slm. (d) 10 nanometer surface hole on sapphire combining annular beam shaping, polarization control and high numerical aperture focusing. (e) Generation of spot arrays in 3D with controlled polarization (not ultrafast laser). (f) Arbitrary intensity distribution controlled polarization distribution (not ultrafast laser). (g) Cutting of cornea using vortex beam shaping (right) compared with regular Gaussian beam (left) showing a smoother and more precise cut. Figure reproduced with permission from: (a) ref.157, the author; (b) ref.158, the author; (c) ref.159, (d) ref.160, under a Creative Commons Attribution License; (e) ref.161, the author; (f) ref.162, the author; (g) ref.163, under a Creative Commons Attribution License.
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Figure 8.
Additive fabrication using spatial beam shaping. Two photon polymerization using arbitrary beam shapes (a) and an array of laser spots (b). (c) Continuous projection of femtosecond pulses using digital micro-mirror device with spatio temporal focusing permits high throughput photo polymerization. (d) Laser induced forward transfer of polymer on PDMS based on spatial intensity shaping using digital micro mirror device. (e) Stimulated emission depletion inspiring two photon polymerization combining the polymerizing beam with a ring shaped depletion beam for improved fabrication resolution. (f) Chiral micro structures achieved with helical phase wavefront on isotropic polymers with coaxial interference second laser beams for different topological charge. (g) Side wall polishing of laser powder bed fusion manufactured parts using non diffractive femtosecond beam. Figure reproduced with permission from: (a) ref.173, the author; (b) ref.172, the author; (c) ref.174, under a Creative Commons Attribution License. (d) ref.175, the author; (e) ref.176, Optical Society of America; (f) ref.177, (g) ref.178, under a Creative Commons Attribution License.
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Figure 9.
Examples of recently developed to improve the fidelity and/or efficacy of spatial beam shaping. (a) Compensating the limited spatial resolution of SLM by using spatial frequency filtering of the phase modulation. (b) Averaging the detrimental speckle effect by addressing different phase masks on the SLM for uniform multi-pulse ablation. (c) Incorporating Vortex elimination during the phase modulation calculation step. (d, e) High fidelity intensity distribution shaping in the region of interest with the compromise of energy losses for atom trapping. (f) Parallel surface structuring using multi-spot arrays with individually controlled spot intensity based on an optical feedback of the experimental intensity distribution. (g) Smooth top hat generation using optical feedback to adjust the intensity pattern in the iterative Fourier transform algorithm. (h) Arbitrary intensity distribution using the GPC technique. (i) Groove machining with controlled intensity distribution using Zernike polynomials optimization. (j) Spatial beam shaping based on diffractive optical neural network. Figure reproduced with permission from: (a) ref.200, the author; (b) ref.201, under a Creative Commons Attribution License; (c) ref.118, Optical Society of America; (d) ref.202, (e) ref.92, under a Creative Commons Attribution License; (f) ref.90,92, Optical Society of America; (g) ref.203, the author; (h) ref.65,68, the author; (i) ref.204, Optical Society of America; (j) ref.226, under Optica Open Access Publishing Agreement.
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Figure 10.
Future research trends taking advantage of the temporal effects associated with spatial shaping. (a) Illustration of the pulse front distortion around the focal point implying complex consequences on the spatial and temporal properties of the local excitation. (b) Pulse front tilt and spatial chirp involving non reciprocal photo inscription on glasses. (c) Concepts for pulse front and wavefront modulation based on an SLM and a DM. (d) Controlling the velocity of the intensity focal point in the focal region along z by tuning the pulse and phase fronts. (e) Simulation of a controlled intensity trajectory with accelerating and decelerating steps. (f) Overcoming ionization induced refraction by controlling the flying focus speed. Figure reproduced with permission from: (a) ref.259, Springer Nature; (b) ref.260, under a Creative Commons Attribution License; (c) ref.261, the author; (d) ref.262, under the Optica Open Access Publishing Agreement; (e) ref.263, the author; (f) ref.264, the author.
