Characteristics of wavefront correction using stacked liquid lens based on electrowetting-on-dielectric

A stacked liquid lens based on electrowetting-on-dielectric (EWOD) is designed to analyze the ability of correcting the distorted wavefront caused by curvature, tilt, and piston. The model of the stacked liquid lens is constructed by COMSOL software which is used to simulate the change of liquid interface with different voltage combinations, and the change range of the interface. The correction ability of the stacked liquid lens at a certain point in the wavefront is assessed from wavefront image and point spread function (PSF) is got by ZEMAX software. The results show that different types of distorted wavefront can be compensated via the stacked liquid lens. The peak-to-valley (PV) value decreases from 19.7853λ to 0.18λ, and the root mean square (RMS) value is down from 5.6638λ to 0.0355λ. Concurrently, the Strehl ratio (SR) increased from near 0 to 0.962. The related research results have broad prospects in the field of wavefront correction.