• Abstract

      Conventional optical microscopy is fundamentally constrained by the optical diffraction limit (~200 nm), restricting the observation of nanoscale features in advanced manufacturing. To address this challenge, a remote-mode microsphere-enabled nanoscale imaging technology has been developed and successfully translated from laboratory innovation to industrial application. By utilizing a suspended transparent microsphere as a miniature lens, the system enables real-time, non-contact optical imaging and resolves 23 nm gaps on silicon wafers and 77 nm metal probes in hard-disk magnetic heads through reverse optical-path reconstruction of virtual images. The technology has been commercialized by PHAOS Technology, achieving over 300% annual sales growth and receiving the "Manufacturing Technology Disruptor of the Year" award. By integrating a universal lens adapter, the system allows a standard 20× objective to achieve imaging performance comparable to a 50× objective at only one-tenth of the cost of high-end super-resolution systems. This approach represents an important advancement in scalable and cost-effective nanometrology, providing a practical solution for real-time semiconductor inspection and industrial quality control.
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