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Yin JB, Zhao YL, Hong MH. High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses. Opto-Electron Adv 7, 240222 (2024). doi: 10.29026/oea.2024.240222
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High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses
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Abstract
High performance laser micromachining based on the combination of GHz burst mode femtosecond pulses irradiation and laser induced plasma assisted ablation can open a new avenue for high-quality and high-efficiency micromachining of single crystalline sapphire. -
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References
[1] Wang SF, Zhang J, Luo DW et al. Transparent ceramics: processing, materials and applications. Prog Solid State Chem 41, 20–54 (2013). doi: 10.1016/j.progsolidstchem.2012.12.002 [2] Liu HG, Lin WX, Hong MH. Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications. Light Sci Appl 10, 162 (2021). doi: 10.1038/s41377-021-00596-5 [3] Yan TY, Ji LF. Ultrafast laser filamentation in transparent solids. Ultrafast Sci 3, 0023 (2023). doi: 10.34133/ultrafastscience.0023 [4] Zhang J, Sugioka K, Midorikawa K. Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. Opt Lett 23, 1486–1488 (1998). doi: 10.1364/OL.23.001486 [5] Hong MH, Sugioka K, Lu YF et al. Laser microfabrication of transparent hard materials and signal diagnostics. Appl Surf Sci 186, 556–561 (2002). doi: 10.1016/S0169-4332(01)00638-9 [6] Zhao YL, Yan TY, Hong MH. Enhancement of laser-induced plasma-assisted ablation of glass substrate via interacting spatial double laser pulse irradiation. Opt Laser Technol 180, 111588 (2025). doi: 10.1016/j.optlastec.2024.111588 [7] Hanada Y, Sugioka K, Miyamoto I et al. Double-pulse irradiation by laser-induced plasma-assisted ablation (LIPAA) and mechanisms study. Appl Surf Sci 248, 276–280 (2005). doi: 10.1016/j.apsusc.2005.03.050 [8] Kerse C, Kalaycıoğlu H, Elahi P et al. Ablation-cooled material removal with ultrafast bursts of pulses. Nature 537, 84–88 (2016). doi: 10.1038/nature18619 [9] Park M, Gu YR, Mao XL et al. Mechanisms of ultrafast GHz burst fs laser ablation. Sci Adv 9, eadf6397 (2023). doi: 10.1126/sciadv.adf6397 [10] Obata K, Kawabata S, Hanada Y et al. High performance micromachining of sapphire by laser induced plasma assisted ablation (LIPAA) using GHz burst mode femtosecond pulses. Opto-Electron Sci 3, 230053 (2024). doi: 10.29026/oes.2024.230053 [11] Lin ZY, Liu K, Cao T et al. Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption. Opto-Electron Adv 6, 230029 (2023). doi: 10.29026/oea.2023.230029 [12] Yin JB, Li YZ, Chen ZW et al. Formation of armored silicon nanowires array via high-repetition-rate femtosecond laser oxidation for robust surface-enhanced Raman scattering detection. ACS Appl Mater Interfaces 16, 48667–48675 (2024). doi: 10.1021/acsami.4c11308 [13] Jia LM, Cheng L, Zheng W. 8-nm narrowband photodetection in diamonds. Opto-Electron Sci 2, 230010 (2023). doi: 10.29026/oes.2023.230010 [14] Wang Z, Zhang B, Tan DZ et al. Ostensibly perpetual optical data storage in glass with ultra-high stability and tailored photoluminescence. Opto-Electron Adv 6, 220008 (2023). doi: 10.29026/oea.2023.220008 -
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Yin JB, Zhao YL, Hong MH. High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses. Opto-Electron Adv 7, 240222 (2024). doi: 10.29026/oea.2024.240222
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Figure 1.
Experimental setup for the GHz burst mode fs-LIPAA process.
