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Zhang L, Zhang M, Chen TN, Liu DJ, Hong SH et al. Ultrahigh-resolution on-chip spectrometer with silicon photonic resonators. Opto-Electron Adv 5, 210100 (2022). doi: 10.29026/oea.2022.210100
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Ultrahigh-resolution on-chip spectrometer with silicon photonic resonators
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Abstract
A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution. It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators for achieving a broadened working window. The present on-chip spectrometer has a footprint as compact as 0.35 mm2, and is realized with standard multi-project-wafer foundry processes. The measurement results show that the on-chip spectrometer has an ultra-high resolution ∆λ of 5 pm and a wide working window of 10 nm. The dynamic range defined as the ratio of the working window and the wavelength resolution is as large as 1940, which is the largest for on-chip dispersive spectrometers to the best of our knowledge. The present high-performance on-chip spectrometer has great potential for high-resolution spectrum measurement in the applications of gas sensing, food monitoring, health analysis, etc.-
Keywords:
- integrated photonics /
- silicon /
- spectrometer /
- resonator
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References
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Zhang L, Zhang M, Chen TN, Liu DJ, Hong SH et al. Ultrahigh-resolution on-chip spectrometer with silicon photonic resonators. Opto-Electron Adv 5, 210100 (2022). doi: 10.29026/oea.2022.210100
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Figure 1.
The 3D view (a) and the top view (b) of the present ultra-high-resolution on-chip spectrometer. Schematic configurations of the ultra-high-Q resonator (c) and the wideband resonator (d). (e) The principle of the spectrum retrieved process.
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Figure 2.
(a) Microscope images of the fabricated ultrahigh-resolution spectrometer. Zoom-in views of the grating coupler (b), the wideband resonator (c), the Euler bend (d), and the heater on ultra-high-Q resonator (e).
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Figure 3.
(a) Measured spectrum response of the fabricated 10-channel wideband resonators. (b) Measured spectral responses at the through/drop ports of the ultrahigh-Q resonator; Inset: the resonance peak. (c) The spectral response of the ultrahigh-Q resonator when applying different heating power. (d) The resonance wavelength as the heating power Ph increases. (e) The calibrated wavelength-power map. As an example, the arrow indicates the peak wavelength λi dropped by the i-th cascaded wideband resonator when the heating power Ph is 30 mW.
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Figure 4.
Retrieved spectrum for a given spectrum with a single peak when using the present on-chip spectrometer as well as a commercial OSA with a resolution of 0.02 nm. (a) The peak wavelength is 1546.61 nm locating at channel C1. (b) The peak wavelength is 1549.45 nm locating at channel C4. (c) The peak wavelength is 1552.67 nm locating at channel C7.
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Figure 5.
Normalized retrieved spectrum with double peak input at channel C7. (a) (1552.627, 1552.632) nm, (b) (1552.024, 1552.624) nm, (c) (1552.643, 1552.646) nm.
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Figure 6.
Measured results for the spectrum generated from a commercial fiber Bragg filter.
