Three-degree-of-freedom common-path laser measurement system

Tingting Wu; Qiangxian Huang; Rui Zhang; Wanduo Wu; Chaoqun Wang

doi:10.3969/j.issn.1003-501X.2017.08.008

Article navigation > Opto-Electronic Engineering > 2017 Vol. 44 > No. 8 > 811-817

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Tingting Wu, Qiangxian Huang, Rui Zhang, et al. Three-degree-of-freedom common-path laser measurement system[J]. Opto-Electronic Engineering, 2017, 44(8): 811-817. doi: 10.3969/j.issn.1003-501X.2017.08.008

Citation:

Tingting Wu, Qiangxian Huang, Rui Zhang, et al. Three-degree-of-freedom common-path laser measurement system[J]. Opto-Electronic Engineering, 2017, 44(8): 811-817. doi: 10.3969/j.issn.1003-501X.2017.08.008

Three-degree-of-freedom common-path laser measurement system

1.
School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China
2.
School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei 230009, China

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More Information

Corresponding author: Qiangxian Huang, E-mail: huangqx@hfut.edu.cn

Received Date 04 May 2017

Revised Date 14 July 2017

Published Date 15 August 2017

Abstract

Abstract

Common optical path arrangement was adopted to design a three-degree-of-freedom laser measurement system for measuring 1D displacement and 2D angles of a moving stage simultaneously on the basis of the principles of Michelson interference and laser auto-collimation. In the displacement measurement, the fine resolution of displacement measurement was achieved by using optical path difference doubling technique. Combined with polarization interference technology and signal differential processing, high-quality displacement output signal was obtained. In the angle measurement, changes in yaw and pitch of a moving stage caused the position change of the mirror which was mounted on the stage. The incident beam was reflected by the mirror and detected by a four-quadrant detector. According to the position change of the spot, yaw and pitch angles were obtained. The stability, resolution tests and the comparison experiments with the British Renishaw XL-80 laser interferometer were done. Experimental results show that the system has the resolution of 0.8 nm for displacement measurement and 0.2″ for angle measurement. Compared with the results of Renishaw XL-80 laser interferometer, the maximum deviation of displacement is less than 100 nm within the measurement range of 50 mm. The maximum deviations of yaw and pitch are 0.5″ and 0.4″.
- common optical path /
- laser /
- polarization interference /
- auto-collimation /
- simultaneous measurement

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References

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Overview

Overview

In the field of advanced processing and manufacturing, precision guide and stage are the important moving parts, which ensure the accuracy of machine tool manufacturing and instrument measurement. The precise installation and adjustment of guide and stage, the detection and control of their location and motion, need to measure multiple spatial parameters of the moving object simultaneously. The traditional commercial measurement instruments, such as the HP5529A Dynamic Calibrator and the Renishaw laser interferometer, can only measure one parameter at a time, and the measurement process is very complicated. Therefore, multi-parameter measurement has become one of the research focuses. At present, domestic and foreign research institutions and manufacturers have developed some measurement devices, but they have the disadvantages of complex structure, uneasy adjustment, small measurement range and low measurement accuracy.
In order to simplify the measurement structure, expand the measurement range and improve the measurement accuracy, a three-degree-of-freedom common-path laser measurement system, which is a combination of the laser interferometer with the auto-collimator, can realize the measurement of three parameters of displacement, yaw and pitch angles simultaneously with the advantages of large stroke, high precision and non-contact.
Common optical path arrangement was adopted to design the three-degree-of-freedom laser measurement system for measuring 1D displacement and 2D angles of a moving stage simultaneously on the basis of the principles of Michelson interference and laser auto-collimation. In the displacement measurement, the fine resolution of displacement measurement was achieved by using polarization interference and optical path difference doubling technique. Adopting four-beam-signal detection technique and signal differential processing, high-quality displacement output signals were obtained. In the angle measurement, changes in yaw and pitch of a moving stage caused the position change of the mirror which was mounted on the stage. The incident beam was reflected by the mirror and detected by a four-quadrant detector. According to the position change of the spot, yaw and pitch angles were detected precisely. In order to verify the effectiveness of the system, the stability and resolution tests and the comparison experiments with the British Renishaw XL-80 laser interferometer were done. Experimental results show that the system has the resolution of 0.8 nm for displacement measurement and 0.2″ for angle measurement. Compared with the results of XL-80 laser interferometer, the maximum deviation of displacement measurement is less than 100 nm within the measurement range of 50 mm. The maximum deviations of yaw and pitch are 0.5″ and 0.4″.