E-mail Alert
RSS
| Citation: |
|
High-Q resonances governed by the quasi-bound states in the continuum in all-dielectric metasurfaces
-
Abstract
The realization of high-Q resonances in a silicon metasurface with various broken-symmetry blocks is reported. Theoretical analysis reveals that the sharp resonances in the metasurfaces originate from symmetry-protected bound in the continuum (BIC) and the magnetic dipole dominates these peculiar states. A smaller size of the defect in the broken-symmetry block gives rise to the resonance with a larger Q factor. Importantly, this relationship can be tuned by changing the structural parameter, resulting from the modulation of the topological configuration of BICs. Consequently, a Q factor of more than 3,000 can be easily achieved by optimizing dimensions of the nanostructure. At this sharp resonance, the intensity of the third harmonic generation signal in the patterned structure can be 368 times larger than that of the flat silicon film. The proposed strategy and underlying theory can open up new avenues to realize ultrasharp resonances, which may promote the development of the potential meta-devices for nonlinearity, lasing action, and sensing. -
-
References
[1] Staude I, Schilling J. Metamaterial-inspired silicon nanophotonics. Nat Photonics 11, 274–284 (2017). doi: 10.1038/nphoton.2017.39 [2] Hsiao HH, Chu CH, Tsai DP. Fundamentals and applications of metasurfaces. Small Methods 1, 1600064 (2017). doi: 10.1002/smtd.201600064 [3] Yu NF, Genevet P, Kats MA, Aieta F, Tetienne JP et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science 334, 333–337 (2011). doi: 10.1126/science.1210713 [4] Lysenko O, Bache M, Olivier N, Zayats AV, Lavrinenko A. Nonlinear dynamics of ultrashort long-range surface plasmon polariton pulses in gold strip waveguides. ACS Photonics 3, 2324–2329 (2016). doi: 10.1021/acsphotonics.6b00509 [5] Lin J, Genevet P, Kats MA, Antoniou N, Capasso F. Nanostructured holograms for broadband manipulation of vector beams. Nano Lett 13, 4269–4274 (2013). doi: 10.1021/nl402039y [6] Ni XJ, Kildishev AV, Shalaev VM. Metasurface holograms for visible light. Nat Commun 4, 2807 (2013). doi: 10.1038/ncomms3807 [7] Levy U, Tsai CH, Kim HC, Fainman Y. Design, fabrication and characterization of subwavelength computer-generated holograms for spot array generation. Opt Express 12, 5345–5355 (2004). doi: 10.1364/OPEX.12.005345 [8] Li L, Li T, Tang XM, Wang SM, Wang QJ et al. Plasmonic polarization generator in well-routed beaming. Light Sci Appl 4, e330 (2015). doi: 10.1038/lsa.2015.103 [9] Wu PC, Tsai WY, Chen WT, Huang YW, Chen TY et al. Versatile polarization generation with an aluminum plasmonic metasurface. Nano Lett 17, 445–452 (2017). doi: 10.1021/acs.nanolett.6b04446 [10] Chen WT, Török P, Foreman MR, Liao CY, Tsai WY et al. Integrated plasmonic metasurfaces for spectropolarimetry. Nanotechnology 27, 224002 (2016). doi: 10.1088/0957-4484/27/22/224002 [11] Foley JM, Phillips JD. Normal incidence narrowband transmission filtering capabilities using symmetry-protected modes of a subwavelength, dielectric grating. Opt Lett 40, 2637–2640 (2015). doi: 10.1364/OL.40.002637 [12] Cambiasso J, König M, Cortés E, Schlücker S, Maier SA. Surface-enhanced spectroscopies of a molecular monolayer in an all-dielectric nanoantenna. ACS Photonics 5, 1546–1557 (2018). doi: 10.1021/acsphotonics.7b01604 [13] Tittl A, Leitis A, Liu MK, Yesilkoy F, Choi DY et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces. Science 360, 1105–1109 (2018). doi: 10.1126/science.aas9768 [14] Zheludev NI, Kivshar YS. From metamaterials to metadevices. Nat Mater 11, 917–924 (2012). doi: 10.1038/nmat3431 [15] Zhang YB, Liu H, Cheng H, Tian JG, Chen SQ. Multidimensional manipulation of wave fields based on artificial microstructures. Opto-Electron Adv 3, 200002 (2020). doi: 10.29026/oea.2020.200002 [16] Zhan A, Colburn S, Dodson CM, Majumdar A. Metasurface freeform nanophotonics. Sci Rep 7, 1673 (2017). doi: 10.1038/s41598-017-01908-9 [17] Hsieh WT, Wu PC, Khurgin JB, Tsai DP, Liu N et al. Comparative analysis of metals and alternative infrared plasmonic materials. ACS Photonics 5, 2541–2548 (2017). [18] Pu MB, Li X, Ma XL, Wang YQ, Zhao ZY et al. Catenary optics for achromatic generation of perfect optical angular momentum. Sci Adv 1, e1500396 (2015). doi: 10.1126/sciadv.1500396 [19] Yu YF, Zhu AY, Paniagua-Domínguez R, Fu YH, Luk’yanchuk B et al. High-transmission dielectric metasurface with 2π phase control at visible wavelengths. Laser Photon Rev 9, 412–418 (2015). doi: 10.1002/lpor.201500041 [20] Ma XL, Pu MB, Li X, Guo YH, Luo XG. All-metallic wide-angle metasurfaces for multifunctional polarization manipulation. Opto-Electron Adv 2, 180023 (2019). doi: 10.29026/oea.2019.180023 [21] Kauranen M, Zayats AV. Nonlinear plasmonics. Nat Photonics 6, 737–748 (2012). doi: 10.1038/nphoton.2012.244 [22] Dreisow F, Szameit A, Heinrich M, Keil R, Nolte S et al. Adiabatic transfer of light via a continuum in optical waveguides. Opt Lett 34, 2405–2407 (2009). doi: 10.1364/OL.34.002405 [23] Foley JM, Young SM, Phillips JD. Symmetry-protected mode coupling near normal incidence for narrow-band transmission filtering in a dielectric grating. Phys Rev B 89, 165111 (2014). doi: 10.1103/PhysRevB.89.165111 [24] Guo JY, Wang T, Quan BG, Zhao H, Gu CZ et al. Polarization multiplexing for double images display. Opto-Electron Adv 2, 180029 (2019). doi: 10.29026/oea.2019.180029 [25] Kruk S, Kivshar Y. Functional meta-optics and nanophotonics governed by Mie resonances. ACS Photonics 4, 2638–2649 (2017). doi: 10.1021/acsphotonics.7b01038 [26] Cardin A, Fan K, Padilla W. Role of loss in all-dielectric metasurfaces. Opt Express 26, 17669–17679 (2018). doi: 10.1364/OE.26.017669 [27] Dou KH, Xie X, Pu MB, Li X, Ma XL et al. Off-axis multi-wavelength dispersion controlling metalens for multi-color imaging. Opto-Electron Adv 3, 190005 (2020). doi: 10.29026/oea.2020.190005 [28] Boltasseva A, Atwater HA. Low-loss plasmonic metamaterials. Science 331, 290–291 (2011). doi: 10.1126/science.1198258 [29] Kuznetsov AI, Miroshnichenko AE, Brongersma ML, Kivshar YS, Luk’yanchuk BL. Optically resonant dielectric nanostructures. Science 354, aag2472 (2016). doi: 10.1126/science.aag2472 [30] Kapitanova P, Ternovski V, Miroshnichenko A, Pavlov N, Belov P et al. Giant field enhancement in high-index dielectric subwavelength particles. Sci Rep 7, 731 (2017). doi: 10.1038/s41598-017-00724-5 [31] Rybin MV, Koshelev KL, Sadrieva ZF, Samusev KB, Bogdanov A et al. High-Q supercavity modes in subwavelength dielectric resonators. Phys Rev Lett 119, 243901 (2017). doi: 10.1103/PhysRevLett.119.243901 [32] Kodigala A, Lepetit T, Gu Q, Bahari B, Fainman Y et al. Lasing action from photonic bound states in continuum. Nature 541, 196–199 (2017). doi: 10.1038/nature20799 [33] Romano S, Zito G, Torino S, Calafiore G, Penzo E et al. Label-free sensing of ultralow-weight molecules with all-dielectric metasurfaces supporting bound states in the continuum. Photon Res 6, 726–733 (2018). doi: 10.1364/PRJ.6.000726 [34] Capasso F, Sirtori C, Faist J, Sivco DL, Chu SNG et al. Observation of an electronic bound state above a potential well. Nature 358, 565–567 (1992). doi: 10.1038/358565a0 [35] Evans DV, Levitin M, Vassiliev D. Existence theorems for trapped modes. J Fluid Mech 261, 21–31 (1994). doi: 10.1017/S0022112094000236 [36] Marinica DC, Borisov AG, Shabanov SV. Bound states in the continuum in photonics. Phys Rev Lett 100, 183902 (2008). doi: 10.1103/PhysRevLett.100.183902 [37] Doeleman HM, Monticone F, den Hollander W, Alù A, Koenderink AF. Experimental observation of a polarization vortex at an optical bound state in the continuum. Nat Photonics 12, 397–401 (2018). doi: 10.1038/s41566-018-0177-5 [38] Hsu CW, Zhen B, Lee J, Chua SL, Johnson SG et al. Observation of trapped light within the radiation continuum. Nature 499, 188–191 (2013). doi: 10.1038/nature12289 [39] Bogdanov AA, Koshelev KL, Kapitanova PV, Rybin MV, Gladyshev SA et al. Bound states in the continuum and Fano resonances in the strong mode coupling regime. Adv Photonics 1, 016001 (2019). [40] Han S, Cong LQ, Srivastava YK, Qiang B, Rybin MV et al. All-dielectric active terahertz photonics driven by bound states in the continuum. Adv Mater 31, 1901921 (2019). doi: 10.1002/adma.201901921 [41] Hsu CW, Zhen B, Stone AD, Joannopoulos JD, Soljačić M. Bound states in the continuum. Nat Rev Mater 1, 16048 (2016). doi: 10.1038/natrevmats.2016.48 [42] Koshelev K, Lepeshov S, Liu MK, Bogdanov A, Kivshar Y. Asymmetric metasurfaces with high-Q resonances governed by bound states in the continuum. Phys Rev Lett 121, 193903 (2018). doi: 10.1103/PhysRevLett.121.193903 [43] Xu L, Kamali KZ, Huang LJ, Rahmani M, Smirnov AN et al. Dynamic nonlinear image tuning through magnetic dipole quasi-BIC ultrathin resonators. Adv Sci 6, 1802119 (2019). [44] Yuan Q, Fang L, Fang H, Li J, Wang T et al. Second harmonic and sum-frequency generations from a silicon metasurface integrated with a two-dimensional material. ACS Photonics 6, 2252–2259 (2019). doi: 10.1021/acsphotonics.9b00553 [45] Fang CZ, Liu Y, Han GQ, Shao Y, Zhang JC et al. Localized plasmon resonances for black phosphorus bowtie nanoantennas at terahertz frequencies. Opt Express 26, 27683–27693 (2018). doi: 10.1364/OE.26.027683 [46] Liu ZJ, Xu Y, Xiang J, Feng TH, Cao QT et al. High-Q quasibound states in the continuum for nonlinear metasurfaces. Phys Rev Lett 123, 253901 (2019). doi: 10.1103/PhysRevLett.123.253901 [47] Sipe JE, van Kranendonk J. Macroscopic electromagnetic theory of resonant dielectrics. Phys Rev A 9, 1806–1822 (1974). doi: 10.1103/PhysRevA.9.1806 [48] Campione S, Liu S, Basilio LI, Warne LK, Langston WL et al. Broken symmetry dielectric resonators for high quality factor Fano metasurfaces. ACS Photonics 3, 2362–2367 (2016). doi: 10.1021/acsphotonics.6b00556 [49] Jin JC, Yin XF, Ni LF, Soljačić M, Zhen B et al. Topologically enabled ultrahigh-Q guided resonances robust to out-of-plane scattering. Nature 574, 501–505 (2019). doi: 10.1038/s41586-019-1664-7 [50] Zhen B, Hsu CW, Lu L, Stone AD, Soljačić M. Topological nature of optical bound states in the continuum. Phys Rev Lett 113, 257401 (2014). doi: 10.1103/PhysRevLett.113.257401 [51] Sadrieva ZF, Sinev IS, Koshelev KL, Samusev A, Iorsh IV et al. Transition from optical bound states in the continuum to leaky resonances: role of substrate and roughness. ACS Photonics 4, 723–727 (2017). doi: 10.1021/acsphotonics.6b00860 [52] Avrutsky I, Gibson R, Sears J, Khitrova G, Gibbs HM et al. Linear systems approach to describing and classifying Fano resonances. Phys Rev B, 87, 125118 (2013). doi: 10.1103/PhysRevB.87.125118 [53] Sain B, Meier C, Zentgraf T. Nonlinear optics in all-dielectric nanoantennas and metasurfaces: a review. Adv Photonics 1, 024002 (2019). [54] Smirnova D, Kivshar YS. Multipolar nonlinear nanophotonics. Optica 3, 1241–1255 (2016). doi: 10.1364/OPTICA.3.001241 [55] Kauranen M. Freeing nonlinear optics from phase matching. Science 342, 1182–1183 (2013). doi: 10.1126/science.1247622 [56] Notomi M. Strong light confinement with periodicity. Proc IEEE 99, 1768–1779 (2011). doi: 10.1109/JPROC.2011.2123850 -
Access History
Figures(5)
Article Metrics
Export File
Citation
Format
Content
DownLoad:
-
Figure 1.
(a) Simulated Q factor and resonant wavelength as a function of θ (top) and l (bottom), respectively. Inset: the schematic view of the model (a square block with l=0.4 μm). (b) Simulated transmission spectrum as a function of the angle and wavelength. Inset: the magnetic field profiles under the normal incidence condition, where white arrows correspond to electric field vectors and the black wireframe outlines the single unit. (c) Modeled the Q factor as a function of a for a broken-symmetry square block (l=0.4 μm). Bottom inset: the schematic image of the concave Si block. The top two insets show the magnetic field distributions at around a=0 μm and a=0.4 μm, respectively. (d) Simulated Q factor and resonant wavelength as a function of θ (top) and l (bottom) for the BIC mode at a=0.4 μm. The top inset: simulated Q factor as a function of l at θ=19°. The bottom left inset: the schematic view of the model (a rectangle block with l1=0.3 μm). The bottom right inset: the magnetic field profile at θ=0°. The scaling parameter is set as 1.2 in (a−d).
-
Figure 2.
(a) Dependence of the Q factor on asymmetry parameter β for both designs (log-log scale). Inset: two definitions of the asymmetry parameter. (b) Simulated Q in momentum space at a=0 μm (left) and a=0.4 μm (right). Inset: the designed patterns shown in the xy plane for both cases. (c) Schematic image of a period metasurface with concave nanopillars. Inset: device fabrication process. (d) SEM image of the fabricated metasurface.
-
Figure 3.
(a) Measured transmission spectrum at different s (20×20 array). Inset: The magnetic field distribution in the yz plane for the metasurface with the substrate. (b) Polarization dependence measurements of the transmission (Texp) and reflection (Rexp) spectra at a wavelength of 1.55 μm and their corresponding calculations (i.e. Tsim and Rsim). The arrow indicates the direction of the x-axis. (c) Top: Modeled the calculated and measured Q factor as a function of a (s=1.2 and b=0.1 μm). Inset: SEM image of the single unit at a=0.02 μm and a=0.32 μm, respectively. Bottom: The evolution of Q factor at different α for two definitions (log-log scale). (d) Numerically simulated dependence of the resonant wavelength and Q factor on tsub (tsub=0 μm means that there is no substrate). The top inset shows the comparison of the measured Q factor for different dimensions and array sizes. Structure 1: l=0.4 μm, a=0.15 μm, b=0.1 μm, and s=1.15. Structure 2: l=0.5 μm, a=0.1 μm, b=0.1 μm, and s=1.02. The bottom inset shows the SEM images of the prepared structures before and after the process optimization.
-
Figure 4.
Magnitude plots of the on-resonance magnetic field for the isolated resonator and 3×3, 5×5, 7×7, and 9×9 arrays. The magnetic field distributions are obtained at the vertical mid-plane of the blocks and the magnitude is indicated by the height. The structural parameters are l =0.4 μm, a=0.15 μm, b=0.1 μm, s=1.2. The table on the right shows the corresponding Q factors.
-
Figure 5.
(a) Measured transmission spectrum of the proposed metasurface (200×200 array) and its fitting of Fano function. Optimized structural parameters are p=0.6 μm, l=0.5 μm, a=0.1 μm, b=0.1 μm, s=1.05. (b) Comparison of THG in the proposed structure (red line) and a flat Si film with the same thickness (black line). The intensity of the THG in the flat Si film is amplified 100 times. (c) The electric field profiles at the resonance (left) and the off-resonance (right), respectively. (d) The corresponding polarization dependence measurements (normalized to the peak value of the resonance).
