Study of low-noise phase-shifting digital holographic microscopy using a long working distance objective

Hui Qiannan; Duan Cunli; Feng Bin; Wang Fan; Guo Rongli

doi:10.12086/oee.2019.190140

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Hui Qiannan, Duan Cunli, Feng Bin, et al. Study of low-noise phase-shifting digital holographic microscopy using a long working distance objective[J]. Opto-Electronic Engineering, 2019, 46(12): 190140. doi: 10.12086/oee.2019.190140

Citation:

Hui Qiannan, Duan Cunli, Feng Bin, et al. Study of low-noise phase-shifting digital holographic microscopy using a long working distance objective[J]. Opto-Electronic Engineering, 2019, 46(12): 190140. doi: 10.12086/oee.2019.190140

Study of low-noise phase-shifting digital holographic microscopy using a long working distance objective

1.
School of Optoelectronic Engineering, Xi'an Technological University, Xi'an, Shaanxi 710021, China
2.
School of Automation, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, China

Fund Project: Supported by National Natural Science Foundation of China (61605152, 11704302), Natural Science Basic Research Plan in Shaanxi Province of China (2018JM6041), and Scientific Special Research Project of Educational Department of Shaanxi Province, China (19JK0415)

More Information

Corresponding authors: Duan Cunli, E-mail:duancunli2003@126.com; Guo Rongli, E-mail:guorongli@xatu.edu.cn

Received Date 27 March 2019

Revised Date 24 July 2019

Published Date 01 December 2019

Abstract

Abstract

In order to improve the measurement accuracy, a kind of phase shifting digital holographic microscopy based on a long working distance microscopic objective is proposed. In the setup, an LED is adopted as the illumination light source, which can suppress coherent noise effectively and hence improve the measurement accuracy. A michelson quasi-common-path interferometer is constructed by adding a beam-splitter between the long working distance objective and the sample. The layout of the setup is simple and it can be easily adjusted, and thus the interference can be come into being conveniently especially when the sample is illuminated with a partial light source. The blind phase-shifting interferometry is adopted in the reconstruction procedure, and the two-step blind phase-shifting algorithm is used to reconstruct the phase map of the measured sample. In the experiments, the height maps of a reflective USAF 1951 resolution target are measured under LED illumination and He-Ne laser illumination, respectively. The measurement results show that both coincide with each other; the phase noise under LED illumination is, however, reduced by 70% when compared with that under laser illumination. In addition, in order to further verify the effectiveness of the device, the device is used to measure a micro-nano rectangular step engraved on the silicon substrate. The measurement results are in good agreement with the nominal values. This technique can be potentially used in the topographic measurement of micro-structures.
- digital holographic microscopy /
- phase-shifting interferometry /
- quasi-common-path /
- partially coherent light

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References

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Overview

Overview

Overview: Digital holographic microscopy (DHM) has been widely applied in biological sample imaging, three-dimensional morphology detection, flow field measurement, and other fields, because it has the advantages of non-contact, non-destructive, high resolution, and so on.

In DHM, the laser is usually used as the illumination source. However, the speckle noise induced by laser is large, and hence it degrades the quality of reconstructed phase image of objects. In order to reduce speckle noise, we use partially coherent light source light emitting diode (LED) as the illumination source. With the adoption of an LED, we proposed a phase-shifting digital holographic microscopic device based on a long working distance objective. By taking advantage of characteristic of long working distance of the objective, a micro-Michelson interferometer is constructed by inserting a non-polarizing beam splitter (NPBS) between the objective and the sample. In the system, as both object wave and reference wave pass through almost the same path, thus the interferometer is a quasi-common-path one. In addition, the system has a compact structure and it is convenient to adjustment. When it is illuminated by an LED, the interference between object wave and reference wave can be easily realized. To reconstruct the phase maps from the holograms, two-step blind phase-shifting algorithm is adopted. To achieve this, a low-cost mechanical micro-displacement platform is used to introduce phase shift between the holograms in the system to replace the usually expensive piezoelectric ceramic transducer (PZT).

Several experiments were conducted to verify the correctness and effectiveness of the system. In the experiments, we measured samples respectively under LED illumination and laser illumination and compared the phase noise level of phase images under different illuminating sources. In the first experiment, the sample is a reflective USAF 1951 resolution target and the experimental results demonstrate that the noise in the phase map with LED illumination is reduced by 70% when compared with that of laser illumination. At the same time, there is no significant difference in system resolution between two reconstructed phase maps corresponding to LED and laser illumination, respectively. Consequently, the proposed scheme can effectively reduce the phase noise and improve the quality of reconstructed phase image. In the second experiment, the device was used to measure a micro-nano step. The measured height was in good agreement with its nominal value. The experimental results show that the system can be potentially applied in the precise measurement of the three-dimensional topography of the micro-structure surface and other related fields.