Xiao S L, Li B C. Residual stress measurement methods of optics[J]. Opto-Electron Eng, 2020, 47(8): 190068. doi: 10.12086/oee.2020.190068
Citation: Xiao S L, Li B C. Residual stress measurement methods of optics[J]. Opto-Electron Eng, 2020, 47(8): 190068. doi: 10.12086/oee.2020.190068

Residual stress measurement methods of optics

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  • Residual stress is an important performance indicator of optics, which is of great significance to the fabrications and applications of optical components. Residual stress measurement methods of optics can be summed up into two categories: methods based on the strain measurement and on the stress induced birefringence measurement, respectively. The strain based methods, which are built upon crystal dynamics and elastic mechanics, including X-ray diffraction (XRD), Stoney curvature method, and micro-Raman spectroscopic method, are well developed and widely used. Methods based on the measurements of birefringence phase retardation induced by residual stress, including digital photoelasticity method, photoelasticitic modulator (PEM) method and polarization-dependent cavity ring-down method, show a higher precision. The principles, measurement precisions and application scenarios of these residual stress measurement methods are summarized in this overview. Comparisons between the performances of these methods are performed and correlations between them are analyzed in detail.
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  • Overview: Residual stress is an important performance indicator of optics, which is of great significance to the fabrications and applications of optical components. Residual stress measurement methods of optics can be summed up into two categories: methods based on strain measurement and on stress induced birefringence measurement, respectively.

    The strain based methods, which are built upon crystal dynamics and elastic mechanics, including X-ray diffraction (XRD), Stoney curvature method, and micro-Raman spectroscopic method, are well developed and widely used. XRD method is the standard residual stress measurement for crystal materials, which is based on the Bragg diffraction of X-rays caused by crystalline lattice. By comparing the lattice distance of stressed and stress-free materials, the residual stress can be precisely determined. The uncertainty of XRD is about ±10 MPa. Stoney curvature method is commonly used for evaluating residual stress in optical thin films. The difference of thermal expansion coefficients between coatings and substrate results in a substrate curvature change after deposition. The measurement precision of Stoney curvature method is about several tens of MPa and is greatly influenced by film/substrate thickness ratio and overall stress uniformity. Micro-Raman spectroscopic method is based on a liner relationship between Raman shift and residual stress of Raman-sensitive materials. The determination of residual stress requires corresponding stress-free reference materials. The measurement precision of Raman spectroscopic method can reach ±10 MPa when the temperature is stabilized.

    Methods based on residual stress induced birefringence phase retardation, including digital photoelasticity method, photoelasticitic modulator (PEM) method and polarization-dependent cavity ring-down (CRD) method, show a higher measurement precision. Digital photoelasticity method which combining polariscope and CCD image processing, is convenient for stress birefringence mapping. Analyzing of isoclinic fringe and isochromatic fringe is key to high precision measurement of birefringence phase difference. The measurement precision of ±0.03 MPa is reached. PEM method is based on periodic modulation of incident polarization in polariscope. Double detection channels and differential data processing scheme improve the measurement precision to ±0.2 kPa. Polarization-dependent CRD method is newly adopted to the measurement of residual stress birefringence of fused silica substrates. Intracavity birefringence caused s- and p- polarization of ring-down decays to oscillate with frequency linearly related to the birefringence phase difference. Polarization-dependent CRD method reaches a measurement precision of ±0.03 kPa, the highest precision for residual stress measurement of optical materials reported to date.

    The principles, measurement precisions and application scenarios of these residual stress measurement methods are summarized in this overview. Comparisons between the performances of these methods are performed and correlations between them are analyzed in details.

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