Current status of ultra-precision manufacturing of complex curved aluminum reflectors

Xu Chao; Peng Xiaoqiang; Dai Yifan

doi:10.12086/oee.2020.200147

Article navigation > Opto-Electronic Engineering > 2020 Vol. 47 > No. 8 > 200147

Next Article Previous Article

Xu C, Peng X Q, Dai Y F. Current status of ultra-precision manufacturing of complex curved aluminum reflectors[J]. Opto-Electron Eng, 2020, 47(8): 200147. doi: 10.12086/oee.2020.200147

Citation:

Xu C, Peng X Q, Dai Y F. Current status of ultra-precision manufacturing of complex curved aluminum reflectors[J]. Opto-Electron Eng, 2020, 47(8): 200147. doi: 10.12086/oee.2020.200147

Current status of ultra-precision manufacturing of complex curved aluminum reflectors

1.
Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha, Hunan 410073, China
2.
College of Intelligent Science and Technology, National University of Defense Technology, Changsha, Hunan 410073, China

Fund Project: Supported by Science Challenge Project (TZ2018006) and National Natural Science Foundation of China (51835013)

More Information

Corresponding author: Peng Xiaoqiang, E-mail: pengxiaoqiang@nudt.edu.cn

Received Date 06 May 2020

Revised Date 28 June 2020

Published Date 01 August 2020

Abstract

Abstract

Due to the unique advantages of complex curved aluminum mirrors, its application in optical systems is becoming more and more widespread. However, the accuracy of optical mirrors that are only processed by ultra-precision turning is limited by the "error reflection" of ultra-precision turning, which can only meet the application requirements of infrared systems, and its further promotion and application have encountered bottlenecks. The combined processing technology of ultra-precision turning, magnetorheological polishing, and computer-controlled surface forming (CCOS), combined with the computational hologram method (CGH) of the complex optical curved surface (CGH) surface shape detection technology, can further improve the surface shape accuracy of the aluminum reflector, to meet the application requirements of visible light systems, and lay the foundation for the promotion and application of complex curved aluminum alloy mirrors.
- complex curved surface /
- aluminum mirror /
- ultra-precision turning /
- polishing /
- computer-generated hologram (CGH)

FullText(HTML)

References

[1]	李信磊.复杂曲面铝反射镜磁流变抛光关键技术研究[D].长沙: 国防科技大学, 2018: 1–51. Google Scholar Li X L. Research on the key technology of magnetorheological polishing of complex curved aluminum mirror[D]. Changsha: National University of Defense Technology, 2018: 1–51. Google Scholar
[2]	张艺.金属铝镜直接光学抛光关键技术研究[D].长沙: 国防科技大学, 2014: 1–59. Google Scholar Zhang Y. Research on the key technologies of direct optical polishing of metal aluminum mirrors[D]. Changsha: National University of Defense Technology, 2014: 1–59.http://cdmd.cnki.com.cn/Article/CDMD-90002-1016921752.htm Google Scholar
[3]	张东阁, 傅雨田.铝合金反射镜的发展与应用[J].红外技术, 2015, 37(10): 814–823. Google Scholar Zhang D G, Fu Y T. Development and application of aluminum mirrors in optical system[J]. Infrared Technology, 2015, 37(10): 814–823. Google Scholar
[4]	Saunders I J, Ploeg L, Dorrepaal M, et al. Fabrication and metrology of freeform aluminum mirrors for the SCUBA-2 instrument[J]. Proceedings of SPIE, 2005, 5869: 586905. doi: 10.1117/12.612998 CrossRef Google Scholar
[5]	Atad-Ettedgui E, Peacocke T, Montgomery D, et al. Opto-mechanical design of SCUBA-2[J]. Proceedings of SPIE, 2006, 6273: 62732H. Google Scholar
[6]	Beier M, Hartung J, Peschel T, et al. Development, fabrication, and testing of an anamorphic imaging snap-together freeform telescope[J]. Applied Optics, 2015, 54(12): 3530–3542. doi: 10.1364/AO.54.003530 CrossRef Google Scholar
[7]	李荣彬, 孔令豹, 张志辉, 等.微结构自由曲面的超精密单点金刚石切削技术概述[J].机械工程学报, 2013, 49(19): 144–155. Google Scholar Li R B, Kong L B, Zhang Z H, et al. An overview of ultra-precision diamond machining of microstructured freeform surfaces[J]. Journal of Mechanical Engineering, 2013, 49(19): 144–155. Google Scholar
[8]	王贵林, 朱登超, 戴一帆.复杂光学表面的快刀伺服加工特性与路径规划[J].机械工程学报, 2011, 47(15): 175–180. Google Scholar Wang G L, Zhu D C, Dai Y F. Machining characteristics and route planning of complex optical surface by using fast tool servo[J]. Journal of Mechanical Engineering, 2011, 47(15): 175–180. Google Scholar
[9]	关朝亮.复杂光学曲面慢刀伺服超精密车削技术研究[D].长沙: 国防科学技术大学, 2010: 1–132. Google Scholar Guan C L. Study on the technology of slow tool servo ultra-precision diamond turning for complex optical surface[D]. Changsha: National University of Defense Technology, 2010: 1–132.http://cdmd.cnki.com.cn/Article/CDMD-90002-2010271296.htm Google Scholar
[10]	Kirschstein S, Koch A, Schöneich J, et al. Metal mirror TMA, telescopes of the JSS product line: design and analysis[J]. Proceedings of SPIE, 2005, 5962: 59621M. doi: 10.1117/12.624354 CrossRef Google Scholar
[11]	Risse S, Gebhardt A, Damm C, et al. Novel TMA telescope based on ultra precise metal mirrors[J]. Proceedings of SPIE, 2008, 7010: 701016. doi: 10.1117/12.789824 CrossRef Google Scholar
[12]	邓金球.铝合金反射镜超精密抛光关键技术研究[D].长沙: 国防科技大学, 2017: 1–71. Google Scholar Deng J Q. Study on the key techniques of ultra-precision polishing of aluminum alloy mirrors[D]. Changsha: National University of Defense Technology, 2017: 1–71.http://cdmd.cnki.com.cn/Article/CDMD-91002-1020701886.htm Google Scholar
[13]	Scheiding S, Damm C, Holota W, et al. Ultra-precisely manufactured mirror assemblies with well-defined reference structures[J]. Proceedings of SPIE, 2010, 7739: 773908. doi: 10.1117/12.856244 CrossRef Google Scholar
[14]	Risse S, Scheiding S, Gebhardt A, et al. Development and fabrication of a hyperspectral, mirror based IR-telescope with ultra-precise manufacturing and mounting techniques for a snap-together system assembly[J]. Proceedings of SPIE, 2011, 8176: 81761N. doi: 10.1117/12.898025 CrossRef Google Scholar
[15]	龙波, 邢廷文, 廖胜.铝镜消应力支撑及SPDT辅助装配设计[J].光电工程, 2014, 41(3): 1–6. doi: 10.3969/j.issn.1003-501X.2014.03.001 CrossRef Google Scholar Long B, Xing T W, Liao S. Design of stress-relief support of aluminum mirrors and assembly assisted by SPDT[J]. Opto-Electronic Engineering, 2014, 41(3): 1–6. doi: 10.3969/j.issn.1003-501X.2014.03.001 CrossRef Google Scholar
[16]	柳鸣, 张立中, 李响, 等.空间轻小型反射镜柔性支撑设计与动力学分析[J].光电工程, 2018, 45(5): 170686. doi: 10.12086/oee.2018.170686 CrossRef Google Scholar Liu M, Zhang L Z, Li X, et al. Design of flexure support of space compact reflector subassembly and dynamic analysis[J]. Opto-Electronic Engineering, 2018, 45(5): 170686. doi: 10.12086/oee.2018.170686 CrossRef Google Scholar
[17]	葛坤鹏, 李圣怡, 胡皓.铝合金反射镜磁流变抛光表面质量控制的参数优化[J].纳米技术与精密工程, 2017, 15(2): 151–157. Google Scholar Ge K G, Li S Y, Hu H. Parameters optimization of surface quality control on magnetorheological finishing for aluminum alloy mirror[J]. Nanotechnology and Precision Engineering, 2017, 15(2): 151–157. Google Scholar
[18]	Schaefer J P. Advanced metal mirror processing for tactical ISR systems[J]. Proceedings of SPIE, 2013, 8713: 871306. doi: 10.1117/12.2015496 CrossRef Google Scholar
[19]	Beier M, Scheiding S, Gebhardt A, et al. Fabrication of high precision metallic freeform mirrors with magnetorheological finishing (MRF)[J]. Proceedings of SPIE, 2013, 8884: 88840S. doi: 10.1117/12.2035986 CrossRef Google Scholar
[20]	周林.光学镜面离子束修形理论与工艺研究[D].长沙: 国防科学技术大学, 2008: 1–112. Google Scholar Zhou L. Study on theory and technology in ion beam figuring for optical surfaces[D]. Changsha: National University of Defense Technology, 2008: 1–112.http://cdmd.cnki.com.cn/Article/CDMD-90002-2010164869.htm Google Scholar
[21]	Kinast J, Schlegel R, Kleinbauer K, et al. Manufacturing of aluminum mirrors for cryogenic applications[J]. Proceedings of SPIE, 2018, 10706: 107063G. Google Scholar
[22]	Schwalm M, Akerstrom A, Barry M, et al. Hardware results for the Wide-field Infrared Survey Explorer (WISE) telescope and scanner[J]. Proceedings of SPIE, 2010, 7731: 77310Y. doi: 10.1117/12.857499 CrossRef Google Scholar
[23]	Sampath D, Akerstrom A, Barry M, et al. The WISE telescope and scanner: design choices and hardware results[J]. Proceedings of SPIE, 2010, 7796: 779609. doi: 10.1117/12.864347 CrossRef Google Scholar
[24]	潘龙, 宫虎, 房丰洲.大尺寸自由曲面铝反射镜超精密抛光工艺[J].纳米技术与精密工程, 2015, 13(2): 108–112. Google Scholar Pan L, Gong H, Fang F Z. Ultra-precision polishing process of large free-form surface aluminum miror[J]. Nanotechnology and Precision Engineering, 2015, 13(2): 108–112. Google Scholar
[25]	Zhang J Z, Zhang X, Tan S L, et al. Design and manufacture of an off-axis aluminum mirror for visible-light imaging[J]. Current Optics and Photonics, 2017, 1(4): 364–371. Google Scholar
[26]	Zhao T, Hu H, Peng X Q, et al. Study on the surface crystallization mechanism and inhibition method in the CMP process of aluminum alloy mirrors[J]. Applied Optics, 2019, 58(22): 6091–6097. doi: 10.1364/AO.58.006091 CrossRef Google Scholar
[27]	Li H Y, Walker D, Zheng X, et al. Advanced techniques for robotic polishing of aluminum mirrors[J]. Proceedings of SPIE, 2018, 10692: 106920N. Google Scholar
[28]	Li H Y, Walker D D, Zheng X, et al. Mid-spatial frequency removal on aluminum free-form mirror[J]. Optics Express, 2019, 27(18): 24885–24899. doi: 10.1364/OE.27.024885 CrossRef Google Scholar
[29]	Hartung J, Vov Lukowicz H, Kinast J. Theoretical compensation of static deformations of freeform multimirror substrates[J]. Applied Optics, 2018, 57(15): 4020–4031. doi: 10.1364/AO.57.004020 CrossRef Google Scholar
[30]	黎发志, 郑立功, 闫锋, 等.自由曲面的CGH光学检测方法与实验[J].红外与激光工程, 2012, 41(4): 1052–1056. Google Scholar Li F Z, Zheng L G, Yan F, et al. Optical testing method and its experiment on freeform surface with computer-generated hologram[J]. Infrared and Laser Engineering, 2012, 41(4): 1052–1056. Google Scholar
[31]	甘子豪, 彭小强, 陈善勇.用于复杂曲面检验校准的CGH关键技术[J].中国计量, 2019, 24(6): 80–85. Google Scholar Gan Z H, Peng X Q, Chen S Y. CGH key technology for inspection and calibration of complex surfaces[J]. China Metrology, 2019, 24(6): 80–85. Google Scholar
[32]	Ma J, Pruss C, Häfner M, et al. Systematic analysis of the measurement of cone angles using high line density computer-generated holograms[J]. Optical Engineering, 2011, 50(5): 055801. doi: 10.1117/1.3575649 CrossRef Google Scholar
[33]	Poleshchuk A G, Korolkov V P, Nasyrov R K, et al. Computer generated holograms: Fabrication and application for precision optical testing[J]. Proceedings of SPIE, 2008, 7102: 710206. doi: 10.1117/12.797816 CrossRef Google Scholar
[34]	Scheiding S, Beier M, Zeitner U D, et al. Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features[J]. Proceedings of SPIE, 2013, 8613: 86130J. doi: 10.1117/12.2001690 CrossRef Google Scholar
[35]	谢意, 陈强, 伍凡, 等.用双计算全息图检测凹非球面[J].光学学报, 2008, 28(7): 1313–1317. Google Scholar Xie Y, Chen Q, Wu F, et al. Concave aspherical surface testing with twin computer-generated holograms[J]. Acta Optica Sinica, 2008, 28(7): 1313–1317. Google Scholar
[36]	Gan Z H, Peng X Q, Chen S Y, et al. Fringe discretization and manufacturing analysis of a computer-generated hologram in a null test of the freeform surface[J]. Applied Optics, 2018, 57(34): 9913–9921. doi: 10.1364/AO.57.009913 CrossRef Google Scholar

Overview

Overview

Overview: The use of complex curved aluminum reflectors can simplify the structure of the optical system, facilitate the manufacture of complex curved surfaces, reduce the quality of the system, provide a more flexible system layout, have a higher degree of design freedom, and can be integrated without heat. Advantages such as design, its application in high-performance optical systems is becoming more and more extensive. Adopt ultra-precision turning processing of complex curved aluminum mirror, one-time processing can obtain a nano-level smooth surface, and the processing repeatability is good, the production efficiency is high, suitable for mass production, and the processing cost is low, but the accuracy is subject to the ultra-precision turning processing error. The limitation of "Review" can only meet the application requirements of infrared system. If you want to get a complex curved aluminum mirror that meets higher requirements, after ultra-precision turning, you must use a subsequent polishing process to improve the surface accuracy of the aluminum mirror and improve its surface quality. At present, the more mature processing methods for polishing aluminum mirrors after ultra-precision turning mainly include computer controlled surface forming (CCOS) polishing and magnetorheological polishing (MRF) developed based on the principle of CCOS technology. CCOS polishing of aluminum alloy mirrors uses the positive pressure of the polishing abrasive and relative motion to mechanically remove the oxide layer formed on the surface of the aluminum mirror by the chemical reaction of the polishing liquid, which can improve the surface accuracy while controlling the surface quality. Magnetorheological polishing is an ultra-precision optical processing technology between contact and non-contact based on the principle of CCOS molding. It can perform deterministic processing of complex curved optical elements. It has a stable polishing process, easy to realize computer control, and materials. The removal efficiency is high, the polishing head is not worn, and high-quality optical surfaces can be obtained. The outstanding advantage of MRF polishing compared to CCOS polishing technology is that the removal function is stable and accurate, and it can adapt to changes in local curvature when polishing aspheric curved mirrors with complex curved surfaces. The use of magnetorheological polishing, computer-controlled surface forming and other post-polishing processing techniques, combined with the current computational hologram (CGH) surface shape detection technology with the highest accuracy in detecting complex curved surface shapes, can further improve the surface accuracy of complex curved aluminum reflector, to meet the application requirements of visible light systems, and lay the foundation for the promotion and application of complex curved aluminum alloy mirrors.