Kong L, Chen L, Ding Y, et al. Variable-inclination Mach-Zehnder interferometer for testing laser robs[J]. Opto-Electron Eng, 2020, 47(2): 190254. doi: 10.12086/oee.2020.190254
Citation: Kong L, Chen L, Ding Y, et al. Variable-inclination Mach-Zehnder interferometer for testing laser robs[J]. Opto-Electron Eng, 2020, 47(2): 190254. doi: 10.12086/oee.2020.190254

Variable-inclination Mach-Zehnder interferometer for testing laser robs

    Fund Project: Supported by National Natural Science Foundation of China (U1731115)
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  • In order to measure the transmission wavefront of laser rods and to improve the edge diffraction effect of small-aperture laser rods measured by Tayman or Fizeau interferometer, a variable-inclination Mach-Zehnder interferometer was proposed. The incident angle was changed by adjusting the tilting attitude of the phase shifting reflector, then the optical path difference was changed that the phase shift was introduced to the coherent light and the phase shifting interferometry was realized. The transmission wavefront of a laser rod (Nd:YAG) with the diameter of 6 mm and the length of 60 mm was measured by this interferometer, the peak-valley (PV) and root mean square (RMS) of the wavefront were 0.391λ and 0.056λ. The same laser rod was measured by ZYGO GPI XP interferometer, the peak-valley (PV) and root mean square (RMS) were 0.370λ and 0.064λ. The comparison results show that the interferometer can achieve high-precision detection of transmission wavefront of laser robs. The variable-inclination Mach-Zehnder interferometer has high phase-shifting precision and wide phase-shifting range, and the beam in the system can pass through the laser rod only once, which can suppress the multi-beam interference and improve the edge diffraction effect of the small-aperture laser rods.
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  • [1] 陈进榜, 张培河.激光棒干涉测试中的若干问题[J].激光与红外, 1986(10): 14-19.

    Google Scholar

    Chen J B, Zhang P H. Several problems in the interferometric of laser robs[J]. Laser and Infrared, 1986(10): 14-19.

    Google Scholar

    [2] 何勇, 陈进榜, 朱日宏, 等.激光棒波前畸变测试仪[J].中国激光, 2003, 30(10): 938-942. doi: 10.3321/j.issn:0258-7025.2003.10.018

    CrossRef Google Scholar

    He Y, Chen J B, Zhu R H, et al. Laser rods wavefront distortion testing instrument[J]. Chinese Journal of Lasers, 2003, 30(10): 938-942. doi: 10.3321/j.issn:0258-7025.2003.10.018

    CrossRef Google Scholar

    [3] 吴志飞, 陈磊, 孔璐, 等.一种用于波前测量的单次透射方法[C]//第十七届全国光学测试学术交流会摘要集, 2018: 1.

    Google Scholar

    Wu Z F, Chen L, Kong L, et al. Single transmission method for wavefront measurement[C]//The 17th National Optical Testing Academic Exchange Conference Summary, 2018: 1.

    Google Scholar

    [4] Bone D J, Bachor H A, Sandeman R J. Fringe-pattern analysis using a 2-D Fourier transform[J]. Applied Optics, 1986, 25(10): 1653-1660. doi: 10.1364/AO.25.001653

    CrossRef Google Scholar

    [5] 孟诗, 陈磊, 朱文华, 等.大口径光学元件瞬态波前检测[J].光电工程, 2018, 45(1): 170536. doi: 10.12086/oee.2018.170536

    CrossRef Google Scholar

    Meng S, Chen L, Zhu W H, et al. Instantaneous wavefront measurement of large aperture optical elements[J]. Opto-Electronic Engineering, 2018, 45(1): 170536. doi: 10.12086/oee.2018.170536

    CrossRef Google Scholar

    [6] 张敏, 唐锋, 王向朝, 等.二维快速傅里叶变换干涉图相位提取误差分析[J].中国激光, 2013, 40(3): 0308002.

    Google Scholar

    Zhang M, Tang F, Wang X Z, et al. Phase retrieval errors analysis of interferogram using two dimensional fast Fourier transform method[J]. Chinese Journal of Lasers, 2013, 40(3): 0308002.

    Google Scholar

    [7] 王圣文, 于瀛洁, 付烨.数字干涉仪移相器PZT位移测量与标定[J].计量与测试技术, 2017, 44(10): 33-35, 37.

    Google Scholar

    Wang S W, Yu Y J, Fu Y. PZT displacement measurement and calibration of digital interferometer phase shifter[J]. Metrology & Measurement Technique, 2017, 44(10): 33-35, 37.

    Google Scholar

    [8] 高志山, 王若言, 成晓强.压电陶瓷装置微位移的光学测量与控制技术[J].电光与控制, 2016, 23(8): 1-5.

    Google Scholar

    Gao Z S, Wang R Y, Cheng X Q. Optical measurement and control of micro displacement for a piezoelectric device[J]. Electronics Optics & Control, 2016, 23(8): 1-5.

    Google Scholar

    [9] Min J W, Yao B L, Gao P, et al. Parallel phase-shifting interferometry based on Michelson-like architecture[J]. Applied Optics, 2010, 49(34): 6612-6616. doi: 10.1364/AO.49.006612

    CrossRef Google Scholar

    [10] Deck L L, Soobitsky J A. Phase-shifting via wavelength tuning in very large aperture interferometers[J]. Proceedings of SPIE, 1999, 3782: 432-442. doi: 10.1117/12.369221

    CrossRef Google Scholar

    [11] 丁煜, 陈磊, 王志华, 等.电调谐波长移相干涉术[J].红外与激光工程, 2018, 47(5): 0506003.

    Google Scholar

    Ding Y, Chen L, Wang Z H, et al. Wavelength phase shifting interferometry based on current modulation[J]. Infrared and Laser Engineering, 2018, 47(5): 0506003.

    Google Scholar

    [12] Chi M J, Jensen O B, Petersen P M. Tuning range and output power optimization of an external-cavity GaN diode laser at 455 nm[J]. Applied Optics, 2016, 55(9): 2263-2269. doi: 10.1364/AO.55.002263

    CrossRef Google Scholar

    [13] Bird D M, Armitage J R, Kashyap R, et al. Narrow line semiconductor laser using fibre grating[J]. Electronics Letters, 1991, 27(13): 1115-1116. doi: 10.1049/el:19910696

    CrossRef Google Scholar

    [14] Sircar S, Bhattacharya K. Measurement of birefringence using polarization phase-shifting Mach-Zehnder interferometer[J]. Optical Engineering, 2015, 54(11): 113112. doi: 10.1117/1.OE.54.11.113112

    CrossRef Google Scholar

    [15] Das T, Bhattacharya K. Polarizing phase shifting interferometry of total internal reflection light for measurement of refractive index and its spatial variation in liquid samples[J]. Optical Engineering, 2016, 55(7): 077102. doi: 10.1117/1.OE.55.7.077102

    CrossRef Google Scholar

    [16] Robledo-Sanchez C, Juarez-Salazar R, Meneses-Fabian C, et al. Phase-shifting interferometry based on the lateral displacement of the light source[J]. Optics Express, 2013, 21(14): 17228-17233. doi: 10.1364/OE.21.017228

    CrossRef Google Scholar

    [17] 刘致远, 陈磊, 朱文华, 等.变倾角移相斜入射动态干涉仪[J].光电工程, 2019, 46(8): 180516. doi: 10.12086/oee.2019.180516

    CrossRef Google Scholar

    Liu Z Y, Chen L, Zhu W H, et al. Oblique incidence dynamic phase-shifting interferometer based on inclination angle deflection[J]. Opto-Electronic Engineering, 2019, 46(8): 180516. doi: 10.12086/oee.2019.180516

    CrossRef Google Scholar

    [18] Deck L L. Model-based phase shifting interferometry[J]. Applied Optics, 2014, 53(21): 4628-4636. doi: 10.1364/AO.53.004628

    CrossRef Google Scholar

    [19] 宋贵才.物理光学理论与应用[M]. 3版.北京:北京大学出版社, 2019.

    Google Scholar

    Song G C. The Theory and Application of Physical Optics[M]. 3rd ed. Beijing: Peking University Press, 2019.

    Google Scholar

  • Overview: In order to measure the transmission wavefront of laser rods and to improve the edge diffraction effect of small-aperture laser rods measured by a general Tayman or Fizeau interferometer, a variable-inclination phase shifting Mach-Zehnder interferometer was proposed. In the proposed interferometer, the phase shifting reflector was placed on the electric linear rotating table. By adjusting the tilting attitude of the phase shifting reflector, the incident angle into the Mach-Zehnder interference cavity was changed. A laser rod with a certain length was placed in the test optical beam as the test object, and it could be used as a retarder in the equal optical path Mach-Zehnder interferometer to increase the optical path difference between the reference beam and the test beam, so the proposed interference system met the requirement of phase shifting. The optical path difference between the reference beam and the test beam changed each time the incident angle into the Mach-Zehnder interference cavity was transformed by the phase shifting reflector placed on the electric linear rotating table, thereby the phase shifting quantity was introduced to the coherent light. The phase shifting interferometry was realized under the interaction of phase shifting reflector and laser rob. The transmission wavefront of a laser rod (Nd:YAG) with the diameter of 6 mm and the length of 60 mm was measured by this interferometer, the peak-valley value (PV) and root mean square value (RMS) of the wavefront are 0.391λ and 0.056λ. The same laser rod is measured by ZYGO GPI XP interferometer, the peak-valley (PV) and root mean square (RMS) of the wavefront are 0.370λ and 0.064λ. The surface shape and numerical values of the two measurements are consistent, the comparison results show that the proposed interferometer can achieve high precision measurement of transmission wavefront of the laser robs. The proposed variable-inclination phase shifting Mach-Zehnder interferometer can realize periodic phase shifting only by using a reflector with adjustable inclination angle in the traditional Mach-Zehnder interferometer. It has high phase shifting precision and wide phase shifting range. The high precision phase modulation can be achieved by using conventional precision stepping motor. The proposed interferometer system is cheap and compact. The transmission wavefront of a small aperture laser rod can be measured by the variable-inclination phase-shifting system. The beam in the system can pass through the laser rod only once, therefore, the interferometer has obvious advantages in measuring the transmission wavefront of a small-aperture optical element with a certain length. It can effectively suppress the multi-beam interference and improve the edge diffraction effect of small-aperture optical elements.

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