For satisfying the boarder application requirement of adaptive optics (AO) and solving the problem of large volume and high cost of conventional deformable mirrors (DM), micro DM based on micro-electro-mechanical system (MEMS) technology is developed and measured. The developed DM has 140 hexagonal parallel plate capacitor electrostatic actuators. The actuators are arranged as a square array and the pitch is 400 μm. A DM prototype is fabricated by MEMS surface micromachining process and packaged by a ceramic pin grid array (CPGA). A miniaturization multi-channel high voltage driver for the DM is developed too. The measurement results show that the prototype has a surface PV value of 411 nm, RMS value of 78 nm, reflectivity of about 80% in 600 nm to 900 nm wavelength, stroke of 1.8 μm, actuator coupling of 15%, working bandwidth of 13 kHz and step response time of 23 μs. Thus the DM has the advantages of small volume, low cost and fast response. Besides the measurement of single element, the whole DM is controlled open loop to fit Zernike aberration and its fitting capability is demonstrated. Above results indicate that the DM prototype can satisfy initially the requirement of AO system.
Development and characterization of a 140-element MEMS deformable mirror
First published at:Mar 15, 2018
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Supported by National Natural Science Foundation of China (11403029), Guangxi Key Laboratory of Automatic Detecting Technology and Instruments (YQ18201), Science & Technology Department of Sichuan Province (2017GZ0329), and Youth Innovation Promotion Association CAS (2014346)
Get Citation: Wang Weimin, Wang Qiang. Development and characterization of a 140-element MEMS deformable mirror[J]. Opto-Electronic Engineering, 2018, 45(3): 170698.