Meng Shi, Chen Lei, Zhu Wenhua, et al. Instantaneous wavefront measurement of large aperture optical elements[J]. Opto-Electronic Engineering, 2018, 45(1): 170536. doi: 10.12086/oee.2018.170536
Citation: Meng Shi, Chen Lei, Zhu Wenhua, et al. Instantaneous wavefront measurement of large aperture optical elements[J]. Opto-Electronic Engineering, 2018, 45(1): 170536. doi: 10.12086/oee.2018.170536

Instantaneous wavefront measurement of large aperture optical elements

    Fund Project: Supproted by National Natural Science Foundation of China (U1231111) and National Natural Science Foundation of Jiangsu (BK2012802)
More Information
  • In order to measure the instantaneous wavefront of large aperture optical elements, a method based on the structure of oblique incidence of reflective shearing point diffraction interferometer is proposed. A lateral displacement between the reference wavefront and the test wavefront is formed after passing this structure. The shear of two beams introduces linear spatial carrier frequency to the point diffraction interferogram. After receiving a good contrast interferogram, wavefront phase is retrieved by Fourier transform (FT) automatically to realize the dynamic measurement of instantaneous wavefront. The optical path is up to 20 m, so the air current is a significance factor to the result. Besides, because of the air current, the system itself can be seen as a instantaneous wavefront happening and measurement of large aperture optical elements. The results indicate that the root mean square value is in accord with that acquired by SID4 wavefront sensor (less than 1/50λ), so about the repeated accuracy. The method proposed can be applied in high resolution and accuracy measurement of instantaneous wavefront.
  • 加载中
  • [1] Malacara D. Optical Shop Testing[M]. Hoboken, N. J: Willy, 2007.

    Google Scholar

    [2] Hernandez-Gomez C, Collier J L, Hawkes S J, et al. Wave-front control of a large-aperture laser system by use of a static phase corrector[J]. Applied Optics, 2000, 39(12): 1954-1961. doi: 10.1364/AO.39.001954

    CrossRef Google Scholar

    [3] 张金平, 张学军, 张忠玉, 等. Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜[J].光学 精密工程, 2012, 20(3): 492-498.

    Google Scholar

    Zhang J P, Zhang X J, Zhang Z Y, et al. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor[J]. Optics and Precision Engineering, 2012, 20(3): 492-498.

    Google Scholar

    [4] 何煦, 马军.共光路径向剪切干涉仪的设计[J].光学 精密工程, 2011, 19(9): 2029-2035.

    Google Scholar

    He X, Ma J. Design of common path radial shearing interferometer[J]. Optics and Precision Engineering, 2011, 19(9): 2029-2035.

    Google Scholar

    [5] Ling T, Liu D, Yang Y Y, et al. Off-axis cyclic radial shearing interferometer for measurement of centrally blocked transient wavefront[J]. Optics Letters, 2013, 38(14): 2493-2495. doi: 10.1364/OL.38.002493

    CrossRef Google Scholar

    [6] Millerd J E, Martnek S J, Brock J N, et al. Instantaneous phase-shift point-diffraction interferometer[J]. Proceedings of SPIE, 2004, 5380: 422-429. doi: 10.1117/12.557126

    CrossRef Google Scholar

    [7] Neal M R, Wyant C J. Polarization phase-shifting point-diffraction interferometer[J]. Applied Optics, 2006, 45(15): 3463-3476. doi: 10.1364/AO.45.003463

    CrossRef Google Scholar

    [8] 刘景峰, 李艳秋, 刘克.移相式点衍射干涉仪的几个关键技术[J].仪器仪表学报, 2007, 28(4): 179-182.

    Google Scholar

    Liu J F, Li Y Q, Liu K. Technical problems in phase-shifting point diffraction interferometer[J]. Chinese Journal of Scientific Instrument, 2007, 28(4): 179-182.

    Google Scholar

    [9] Du Y Z, Feng G Y, Li H R, et al. Circular common-path point diffraction interferometer[J]. Optics Letters, 2012, 37(19): 3927-3929. doi: 10.1364/OL.37.003927

    CrossRef Google Scholar

    [10] 吴亚琴. 基于傅里叶变换法的环形共光路点衍射干涉仪[D]. 呼和浩特: 内蒙古工业大学, 2014.

    Google Scholar

    Wu Y Q. Cyclic common-path point-diffraction interferometer based on Fourier-transiorm method[D]. Hohhot: Inner Mongolia University of Technology, 2014.http://cdmd.cnki.com.cn/article/cdmd-10128-1015532104.htm

    Google Scholar

    [11] 吴亚琴, 白福忠, 刘珍, 等.环形共光路点衍射干涉仪[J].光学技术, 2014, 40(5): 421-424.

    Google Scholar

    Wu Y Q, Bai F Z, Liu Z, et al. Circular common-path point-diffraction interferometer[J]. Optical Technique, 2014, 40(5): 421-424.

    Google Scholar

    [12] 李金鹏, 陈磊, 万骏, 等.光栅点衍射干涉法检测Φ400mm瞬态波前[J].光学 精密工程, 2015, 23(6): 1538-1546.

    Google Scholar

    Li J P, Chen L, Wan J, et al. Evaluation of Φ400 mm instantaneous wavefront using grating point diffraction interferometry[J]. Optics and Precision Engineering, 2015, 23(6): 1538-1546.

    Google Scholar

    [13] 卢增雄, 金春水, 马冬梅, 等.微小孔偏差对远场波前质量影响分析[J].光学学报, 2011, 31(8): 0812002.

    Google Scholar

    Lu Z X, Jin C S, Ma D M, et al. Analysis of effect of tiny pinhole deviation on far-field wave-front quality[J]. Acta Optica Sinica, 2011, 31(8): 0812002.

    Google Scholar

    [14] Takeda M, Ina H, Kobayashi S. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[J]. Journal of the Optical Society of America, 1982, 72(1): 156-160. doi: 10.1364/JOSA.72.000156

    CrossRef Google Scholar

    [15] Roddier C, Roddier F. Interferogram analysis using Fourier transform techniques[J]. Applied Optics, 1987, 26(9): 1668-1673. doi: 10.1364/AO.26.001668

    CrossRef Google Scholar

  • Overview: In order to measure the instantaneous wavefront of large aperture optical elements, a method based on the structure of oblique incidence of reflective shearing point diffraction interferometer is proposed. In the measurement, the near infrared fiber laser, which operates at 1313 nm wavelength, works as a light source. The light beam transmits through the spatial filter to generate a standard spherical wavefront. The standard spherical wavefront passes through the beam splitter and then it reaches the off-axis parabolic mirror whose diameter is 400 mm and F number is 10. The off-axis parabolic mirror realizes the transformation between the convergent wavefront and the collimation wavefront. The collimated wavefront reaches back to the off-axis mirror after being reflected by the mirror under test. The wavefront to be measured is splitted into two parts. One part is reflected directly from the slit and form the wavefront to be measured, the other part transmits through the slit and is diffracted by the pinhole to get a standard spherical wavefront works as the reference wavefront.These two kinds of wavefront form interference fringe at the target surface of the CCD and the imaging lens images the location of the exit pupil. Because of the transverse dislocation of the two beams of light, high linear carrier frequency of the interferogram is introduced.The frequency of the linear carrier is set, by adjusting the incidence angle θ, near the Nyquist frequency as close as possible. After receiving a good contrast interferogram, wavefront phase is retrieved by Fourier transform (FT) automatically to realize the dynamic measurement of instantaneous wavefront. On the basis of scalar diffraction theory and Fourier optics theory, a theoretical model of instantaneous wavefront was established and formula of linear carrier was derived.Furthermore, to study the effect which the lateral and axial defocus of pinhole have on diffraction intensity and reference wavefront quality, a mathematical model of convergent beam diffraction by a pinhole is established based on Fresnel diffraction theory. F number of the converging beam, diameter of the pinhole and so on are also taken into account. The optical path is up to 20 m, due to the long cavity of the optical path, the air current is a significance factor to the result. Besides, because of the air current, the system itself can be seen as a instantaneous wavefront happening and measurement of large aperture optical elements. The results indicate that the root mean square value is in accord with that acquired by SID4 wavefront sensor (less than 1/50λ), so about the repeated accuracy. The testing method proposed can be applied in high resolution and accuracy measurement of instantaneous wavefront

  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索

Figures(5)

Tables(1)

Article Metrics

Article views(7689) PDF downloads(4172) Cited by(0)

Access History

Other Articles By Authors

Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint