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Research progress of pressure detection and applications in liquid-assisted laser machining
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摘要:
液体辅助激光加工是一种复合制造技术，凭借其特有的特点及优势，在相关领域受到广泛的关注和应用，同时也成为激光与液体介质相互作用研究领域的一大热点。本文综述了液体辅助激光加工过程中冲击波和高速微射流的压力研究现状，简述了液体辅助激光加工过程中压力现象产生的机理、压力的基本特征以及影响压力的因素，重点介绍了液体辅助激光加工过程中产生的冲击波、微射流等冲击压力的检测方法和最新研究进展，并对各检测方法的特点做出总结。最后介绍了液体辅助激光加工在相关领域的应用，并对该技术的发展前景作出展望。
Abstract:Liquid-assisted laser machining is a composite manufacturing technology. Depending on its unique characteristics and advantages, it already has been received widely attention and applications in the field of manufacturing. The technology has become a hot spot in the interaction between laser and liquid medium. In this paper, the research status of shock wave and high-speed micro-jet pressure in liquid-assisted laser process is reviewed. The mechanism, the basic characteristics of pressure and the factors that affect the pressure in the process of liquid-assisted laser machining are resumed. The research method and the latest progress of the pressure phenomenon in the laser wet machining are mainly introduced. The advantages and disadvantages of these pressure detection methods are summarized. Finally, the applications of liquid-assisted laser machining in related fields are introduced and the prospects of this technology are summarized.
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Key words:
- liquid-assisted laser machining /
- pressure detection /
- shock wave /
- micro-jet
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Abstract:Liquid-assisted laser machining (LALM) is a composite manufacturing technology. During liquid-assisted laser machining, the liquid has the functions of cooling and cleaning on the processing area. It makes the heat affected area of the work piece become smaller. The thermal stress is reduced, and the processing incision is smooth and cleaning. So the liquid-assisted laser machining has unique advantages in the processing of heat sensitive materials, high harden-brittle materials and materials of high precision requirements. Due to the addition of liquid in the laser processing, the laser interacts with the machined and the added working liquid. Some researchers have found that the pressure in the process of liquid-assisted laser machining is produced through the study of the experiments and simulation. The existence of pressure results in the complexity of the laser processing even the processing mechanism would be changed. Then the process is difficult to be controlled. Therefore the process of liquid-assisted laser machining should be detected. In order to better master and control this technology, many researchers have studied the existence of pressure in the process. And it has become a research hotspot in the field of laser composite processing. At present, most of the numerical simulation and experimental studies on the pulsation, shock wave, micro-jets and acoustic radiation of single bubble generated by single pulse laser are carried out. However, multi-bubble is usually produced in the process of liquid-assisted laser machining, which makes the phenomenon and the mechanism of laser processing become more complex. These complex phenomenon and mechanisms should be further explored and studied by researchers.
In this paper, the research status of pressure of shock wave and high speed micro-jet in liquid assisted laser machining has been reviewed. The mechanism of pressure generation and the basic characteristics of pressure are briefly resumed in liquid-assisted laser machining, the effects of laser energy, liquid viscosity, liquid surface tension, liquid gas content and the distance of laser focus on solid surface are summarized. And the detection methods of the impact pressure, such as shock wave and micro-jet are mainly introduced in the process of liquid assisted laser machining. And the characteristics of the detection methods, such as photography technology, optical deflection measurement method, hydrophone detection method and high frequency piezoelectric sensor detection method are summarized. Many researchers usually use two or more detection methods to study the distribution of the pressure field, the direction of the shock wave and the micro-jets, and the variation of pressure. Finally, the applications of liquid-assisted laser machining in micro-nano manufacturing, biomedicine and surface treatment are introduced and the prospects of the technology are summarized.
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图 9 单脉冲激光作用于液体的压力信号.
Figure 9. Pressure signal induced by single-pulse laser in the water.
图 10 多脉冲激光背向湿式刻蚀蓝宝石的压力信号.
Figure 10. Pressure signal by multi-pulse laser-induced backside wet etching sapphire substrates.
图 17 激光液相烧蚀制备的ZnO粉末在不同的输出能量条件下测得的AFM图[46]. (a)激光输出能量为70 mJ，粒子粒径约为8 nm. (b)激光输出能量为60 mJ，粒子粒径约为15 nm. (c)激光输出能量为50 mJ，粒子粒径约为40 nm.
Figure 17. ZnO nano-material's AFM images under different output energy by liquid laser ablation [46]. (a) The laser output energy is 70 mJ and the particle size is about 8 nm. (b) The laser output energy is 60 mJ and the particle size is about 15 nm. (c) The laser output energy is 50 mJ and the particle size is about 40 nm.
表 1 各种压力检测方法的特点.
Table 1. The characteristics of various pressure detection methods.
方法 优点 缺点 摄影技术法 可获得分辨率较高二维图像；能够直观的观察到空泡的脉动过程；可以观测冲击波和微射流的远动及流场的分布 不能对压力进行实时观测和分析；不适用于不透明的液体；设备价格昂贵 光偏转测量法 频带宽，量程大；可以直接检测得到压力随时间变化的信号；适合检测冲击波和微射流对固壁的作用力 灵敏度与可测试的频带存在矛盾；误差较大 水听器探测法 尺寸小，对原压力场扰动小；频带宽，灵敏度高；可以进行点位压力检测 量程小，只能探测弱冲击波和声波 高频压电传感器检测法 灵敏度高，量程大；能够在恶劣环境下工作；能够直接输出压力随时间变化信号 存在原场干扰；频带窄 
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