Zhouquan Cao, Xiaozhu Xie, Weifang Chen, et al. Research progress of pressure detection and applications in liquid-assisted laser machining[J]. Opto-Electronic Engineering, 2017, 44(4): 381-392. doi: 10.3969/j.issn.1003-501X.2017.04.001
Citation: Zhouquan Cao, Xiaozhu Xie, Weifang Chen, et al. Research progress of pressure detection and applications in liquid-assisted laser machining[J]. Opto-Electronic Engineering, 2017, 44(4): 381-392. doi: 10.3969/j.issn.1003-501X.2017.04.001

Research progress of pressure detection and applications in liquid-assisted laser machining

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  • Liquid-assisted laser machining is a composite manufacturing technology. Depending on its unique characteristics and advantages, it already has been received widely attention and applications in the field of manufacturing. The technology has become a hot spot in the interaction between laser and liquid medium. In this paper, the research status of shock wave and high-speed micro-jet pressure in liquid-assisted laser process is reviewed. The mechanism, the basic characteristics of pressure and the factors that affect the pressure in the process of liquid-assisted laser machining are resumed. The research method and the latest progress of the pressure phenomenon in the laser wet machining are mainly introduced. The advantages and disadvantages of these pressure detection methods are summarized. Finally, the applications of liquid-assisted laser machining in related fields are introduced and the prospects of this technology are summarized.
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  • [1] Kruusing A. Handbook of liquids-assisted laser processing [M]. Amsterdam: Elsevier Ltd, 2008.

    Google Scholar

    [2] Huang Z Q, Hong M H, Do T B M, et al. Laser etching of glass substrates by 1064 nm laser irradiation[J]. Applied Physics A, 2008, 93(1):159-163. doi: 10.1007/s00339-008-4674-0

    CrossRef Google Scholar

    [3] Lee T, Jang D, Ahn D, et al. Effect of liquid environment on laser-induced backside wet etching of fused silica[J]. Journal of Applied Physics, 2010, 107(3):033112-033112-8. doi: 10.1063/1.3294615

    CrossRef Google Scholar

    [4] Gupta P K, Ghosh N, Patel H S. Lasers and laser tissue interaction[M]. London: Imperial College Press, 2014: 123-151.

    Google Scholar

    [5] Peel C. Laser induced breakdown spectrocscopy for elemental analysis in aqueous media[D]. Cranfield: Cranfield University, 2012.

    Google Scholar

    [6] 刘涛, 王江安, 宗思光, 等.基于激光水下爆炸声源的声探测技术[J].强激光与粒子束, 2012, 24(12): 2822-2826.

    Google Scholar

    Liu Tao, Wang Jiang'an, Zong Siguang, et al. Detecting technology based on laser-induced sound by underwater explosion [J]. High Power Laser and Particle Beams, 2012, 24(12): 2822-2826.

    Google Scholar

    [7] Brujan E A, Ikeda T, Yoshinaka K, et al. The final stage of the collapse of a cloud of bubbles close to a rigid boundary[J]. Ultrasonics Sonochemistry, 2011, 18(1): 59-64. doi: 10.1016/j.ultsonch.2010.07.004

    CrossRef Google Scholar

    [8] 刘涛, 王江安, 宗思光, 等.激光空泡在刚性壁面附近空蚀特性[J].强激光与粒子束, 2011, 23(2): 298-302.

    Google Scholar

    Liu Tao, Wang Jiang'an, Zong Siguang, et al. Cavitation erosion by laser-generated bubble near rigid boundary[J]. High Power Laser and Particle Beams, 2011, 23(2): 298-302.

    Google Scholar

    [9] Naudé C F, Ellis A T. On the mechanism of cavitation damage by non-hemispherical cavities collapsing in contact with a solid boundary[J]. Journal of Basic Engineering, 1961, 83(4): 648-656. doi: 10.1115/1.3662286

    CrossRef Google Scholar

    [10] Benjamin T B, Ellis A T. The collapse of cavitation bubbles and the pressures thereby produced against solid boundaries[J]. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 1966, 260(1110): 221-240. doi: 10.1098/rsta.1966.0046

    CrossRef Google Scholar

    [11] 刘秀梅. 液体参量对激光空泡产生和溃灭的影响研究[D]. 南京: 南京理工大学, 2009.

    Google Scholar

    Liu Xiumei. Effect of liquid parameters on expansion and collapse of laser-induced cavitation bubble[D]. Nanjing: Nanjing University of Science and Technology, 2009.

    Google Scholar

    [12] 贺杰. 表面张力对光致空泡动力学特性影响的实验研究[D]. 南京: 南京理工大学, 2008.

    Google Scholar

    He Jie. Effect of liquid surface tension on the dynamic characteristics of laser-induced cavitation bubble[D]. Nanjing: Nanjing University of Science and Technology, 2008.

    Google Scholar

    [13] Popinet S, Zaleski S. Bubble collapse near a solid boundary: a numerical study of the influence of viscosity[J]. Journal of Fluid Mechanics, 2002, 464: 137-163.

    Google Scholar

    [14] 韩冰. 激光空泡相互作用及非对称溃灭的力学特性研究[D]. 南京: 南京理工大学, 2013.

    Google Scholar

    Han Bing. Interaction of laser-induced cavitation bubbles and mechanical effects from the nonspherical bubble collapse[D]. Nanjing: Nanjing University of Science and Technology, 2013.

    Google Scholar

    [15] Liu Xiumei, He Jie, Lu Jian, et al. Effect of surface tension on a liquid-jet produced by the collapse of a laser-induced bubble against a rigid boundary[J]. Optics & Laser Technology, 2009, 41(1): 21-24.

    Google Scholar

    [16] Yang Yuanxiang, Wang Qianxi, Keat T S. Dynamic features of a laser-induced cavitation bubble near a solid boundary[J]. Ultrasonics Sonochemistry, 2013, 20(4): 1098-1103. doi: 10.1016/j.ultsonch.2013.01.010

    CrossRef Google Scholar

    [17] Vogel A, Lauterborn W, Timm R. Optical and acoustic investigations of the dynamics of laser-produced cavitation bubbles near a solid boundary[J]. Journal of Fluid Mechanics, 1989, 206: 299-338. doi: 10.1017/S0022112089002314

    CrossRef Google Scholar

    [18] 赵瑞. 激光等离子体冲击波传输及空泡动力学特性研究[D]. 南京: 南京理工大学, 2007.

    Google Scholar

    Zhao Rui. Studies on characteristic of laser-induced plasma shock wave evolution and cavitation bubble dynamics[D]. Nanjing: Nanjing University of Science and Technology, 2007.

    Google Scholar

    [19] Zhao Rui, Liang Zhongcheng, Xu Rongqing, et al. Dynamics of laser-induced cavitation bubble near solid boundary[J]. Japanese Journal of Applied Physics, 2008, 47(7): 5482-5485. doi: 10.1143/JJAP.47.5482

    CrossRef Google Scholar

    [20] 宗思光.激光击穿液体介质的空化与声辐射[M].北京:国防工业出版社, 2013.

    Google Scholar

    Zong Siguang. Cavitation and sound radicalization with laser-induced breakdown in liquid[M]. Beijing: National Defence Industry Press, 2013.

    Google Scholar

    [21] 谢小柱, 苑学瑞, 陈蔚芳, 等.激光诱导空泡技术研究和应用新进展[J].激光与光电子学进展, 2013, 50(8): 080017.

    Google Scholar

    Xie Xiaozhu, Yuan Xuerui, Chen Weifang, et al. New development and applications of laser-induced cavitation bubbles[J]. Laser & Optoelectronics Progress, 2013, 50(8): 080017.

    Google Scholar

    [22] 韩冰, 张海, 于晓光, 等.一种测定空化水喷丸工艺中冲击压力场分布规律的方法[J].振动与冲击, 2013, 32(2): 6-8, 23.

    Google Scholar

    Han Bing, Zhang Hai, Yu Xiaoguang, et al. A method for measuring distribution of impact pressure field in water-jet cavitation peening processing[J]. Journal of Vibration and Shock, 2013, 32(2): 6-8, 23.

    Google Scholar

    [23] 宗思光, 王江安, 马治国.激光空泡的溃灭发光及冲击波辐射[J].中国激光, 2010, 37(4): 1000-1006.

    Google Scholar

    Zong Siguang, Wang Jiang'an, Ma Zhiguo. Lighting and shock wave emission of laser cavitation bubble collapse[J]. Chinese Journal of Lasers, 2010, 37(4): 1000-1006.

    Google Scholar

    [24] 胡满凤. 激光背向湿式蚀刻加工蓝宝石过程中光诱导气泡和微射流流场分布研究[D]. 广州: 广东工业大学, 2014.

    Google Scholar

    Hu Manfeng. Study on laser induced cavitation bubbles and flow field distribution during laser-induced backside wet etching sapphire substrates[D]. Guangzhou: Guangdong University of Technology, 2014.

    Google Scholar

    [25] Xie X Z. Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation[J]. Journal of Laser Micro/Nanoengineering, 2013, 8(3): 259-265.

    Google Scholar

    [26] 李贝贝. 环境参数对激光空泡动力学行为的影响及测试方法研究[D]. 南京: 南京理工大学, 2012.

    Google Scholar

    Li Beibei. Study on the test methods and effects of ambient parameters for the laser-induced cavitation bubble[D]. Nanjing: Nanjing University of Science and Technology, 2012.

    Google Scholar

    [27] 徐荣青, 陈笑, 沈中华, 等.固体壁面附近激光空泡的动力学特性研究[J].物理学报, 2004, 53(5): 1413-1418. doi: 10.7498/aps.53.1413

    CrossRef Google Scholar

    Xu Rongqing, Chen Xiao, Shen Zhonghua, et al. Dynamics of laser-induced cavitation bubbles near solid boundaries[J]. Acta Physica Sinica, 2004, 53(5): 1413-1418. doi: 10.7498/aps.53.1413

    CrossRef Google Scholar

    [28] Xu R Q, Chen X, Shen Z H, et al. A fiber-optic diagnostic technique for mechanical detection of the laser-metal interaction underwater[J]. Physics of Fluids, 2004, 16(3): 832-835. doi: 10.1063/1.1639153

    CrossRef Google Scholar

    [29] 蒋红亮. 激光空泡动力学特性的研究[D]. 南京: 南京邮电大学, 2010.

    Google Scholar

    Jiang Hongliang. Study on dynamic characteristics of laser-generated bubble[D]. Nanjing: Nanjing University of Posts and Telecommunications, 2010.

    Google Scholar

    [30] Lush P A. Impact of a liquid mass on a perfectly plastic solid[J]. Journal of Fluid Mechanics, 1983, 135: 373-387. doi: 10.1017/S0022112083003134

    CrossRef Google Scholar

    [31] 李贝贝, 张宏超, 倪晓武, 等.不同环境压强下激光空泡溃灭射流的实验研究[J].激光技术, 2012, 36(6): 749-753.

    Google Scholar

    Li Beibei, Zhang Hongchao, Ni Xiaowu, et al. Experiment investigation on the liquid jet of laser-induced bubble in different ambient pressures[J]. Laser Technology, 2012, 36(6): 749-753.

    Google Scholar

    [32] 宗思光, 王江安, 王雨虹.脉冲激光击穿水介质特性的实验研究[J].光电工程, 2008, 35(11): 68-72. doi: 10.3969/j.issn.1003-501X.2008.11.014

    CrossRef Google Scholar

    Zong Siguang, Wang Jiang'an, Wang Yuhong. Experiment investigation of water breakdown characteristic by high power laser[J]. Opto-Electronic Engineering, 2008, 35(11): 68-72. doi: 10.3969/j.issn.1003-501X.2008.11.014

    CrossRef Google Scholar

    [33] 李胜勇, 刘晓然, 王江安, 等.含气量对粘性液体中空泡声波频谱特性的影响[J].光电子·激光, 2012, 23(6): 1206-1210.

    Google Scholar

    Li Shengyong, Liu Xiaoran, Wang Jiang'an, et al. Influence of gas content on spectrum properties of laser-induced cavitation bubble collapse sound waves in viscous liquid[J]. Journal of Optoelectronics·Laser, 2012, 23(6): 1206-1210.

    Google Scholar

    [34] 李胜勇, 王晓宇, 王江安, 等.环境压强对激光空泡声波特性影响的实验研究[J].红外与激光工程, 2015, 44(3): 879-883.

    Google Scholar

    Li Shengyong, Wang Xiaoyu, Wang Jiang'an, et al. Experimental investigation of influence of ambient pressure on properties of laser-induced cavitation bubble collapse sound waves[J]. Infrared and Laser Engineering, 2015, 44(3): 879-883.

    Google Scholar

    [35] 闫潇敏, 李芝绒, 仲凯, 等.聚偏氟乙烯传感器水中爆炸压力测量研究[J].科学技术与工程, 2015, 15(9): 189-192.

    Google Scholar

    Yan Xiaomin, Li Zhirong, Zhong Kai, et al. Research on measurement of underwater explosion pressure with PVDF sensor[J]. Science Technology and Engineering, 2015, 15(9): 189-192.

    Google Scholar

    [36] 胡亚峰, 刘建青, 顾文彬, 等. PVDF应力测试技术及其在多孔材料爆炸冲击实验中的应用[J].爆炸与冲击, 2016, 36(5): 655-662. doi: 10.11883/1001-1455(2016)05-0655-08

    CrossRef Google Scholar

    Hu Yafeng, Liu Jianqing, Gu Wenbin, et al. Stress-testing method by PVDF gauge and its application in explosive test of porous material[J]. Explosion and Shock Waves, 2016, 36(5): 655-662. doi: 10.11883/1001-1455(2016)05-0655-08

    CrossRef Google Scholar

    [37] 刘瑞军, 陈东林, 何卫锋, 等.基于激光冲击强化的冲击波实验研究[J].应用激光, 2010, 30(3): 204-206.

    Google Scholar

    Liu Ruijun, Chen Donglin, He Weifeng, et al. Experimental study of shock wave based on laser shock processing[J]. Applied Laser, 2010, 30(3): 204-206.

    Google Scholar

    [38] 胡炎. 纳秒/皮秒激光对石英玻璃高精细加工的研究[D]. 北京: 北京工业大学, 2015.

    Google Scholar

    Hu Yan. Study on nanosecond/picosecond laser high-precision machining of quartz glass[D]. Beijing: Beijing University of Technology, 2015.

    Google Scholar

    [39] Niino H. Surface microstructuring of inclined trench structures of silica glass by laser-induced backside wet etching[J]. Journal of Laser Micro/Nanoengineering, 2008, 3(3): 182-185.

    Google Scholar

    [40] Niino H, Kawaguchi Y, Sato T, et al. Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser[J]. Applied Surface Science, 2007, 253(19): 8287-8291. doi: 10.1016/j.apsusc.2007.02.099

    CrossRef Google Scholar

    [41] Niino H, Kawaguchi Y, Sato T, et al. Surface microstructuring by laser-induced backside wet etching[M]. Tsukuba, Japan: SPIE, 2009.

    Google Scholar

    [42] 高勋银. 激光湿式切割蓝宝石过程中工作液体的研制及加工机理研究[D]. 广州: 广东工业大学, 2014.

    Google Scholar

    Gao Xunyin. study on the development of working solution and processing mechanism of laser wet etching sapphire substrate[D]. Guangzhou: Guangdong University of Technology, 2014.

    Google Scholar

    [43] Kawaguchi Y, Sato T, Narazaki A, et al. Rapid prototyping of silica glass microstructures by the LIBWE method: fabrication of deep microtrenches[J]. Journal of Photochemistry and Photobiology A: Chemistry, 2006, 182(3): 319-324. doi: 10.1016/j.jphotochem.2006.05.033

    CrossRef Google Scholar

    [44] Lin Geng, Tan Dezhi, Luo Fangfang, et al. Fabrication and photocatalytic property of α-Bi2O3 nanoparticles by femtosecond laser ablation in liquid[J]. Journal of Alloys and Compounds, 2010, 507(2): L43-L46. doi: 10.1016/j.jallcom.2010.08.014

    CrossRef Google Scholar

    [45] Liu Peisheng, Cai Weiping, Zeng Haibo. Fabrication and size-dependent optical properties of FeO nanoparticles induced by laser ablation in a liquid medium[J]. The Journal of Physical Chemistry C, 2008, 112(9): 3261-3266. doi: 10.1021/jp709714a

    CrossRef Google Scholar

    [46] 何国庆. 激光液相烧蚀制备纳米颗粒的研究[D]. 聊城: 聊城大学, 2014.

    Google Scholar

    He Guoqing. Preparation of nano particles in laser ablation in liquids[D]. Liaocheng: Liaocheng University, 2014.

    Google Scholar

    [47] Intartaglia R, Bagga K, Scotto M, et al. Luminescent silicon nanoparticles prepared by ultra short pulsed laser ablation in liquid for imaging applications[J]. Optical Materials Express, 2012, 2(5): 510-518. doi: 10.1364/OME.2.000510

    CrossRef Google Scholar

    [48] Quinto-Su P A, Kuss C, Preiser P R, et al. Red blood cell rheology using single controlled laser-induced cavitation bubbles[J]. Lab on A Chip, 2011, 11(4): 672-678. doi: 10.1039/C0LC00182A

    CrossRef Google Scholar

    [49] Quinto-Su P A, Dijkink R, Prabowo F, et al. Interaction of red blood cells with arrays of laser-induced cavitation bubbles[C]. Proceedings of the 7th International Symposium on Cavitation, 2009.

    Google Scholar

    [50] Park M A, Jang H J, Sirotkin F V, et al. Er: YAG laser pulse for small-dose splashback-free microjet transdermal drug delivery[J]. Optics Letters, 2012, 37(18): 3894-3896. doi: 10.1364/OL.37.003894

    CrossRef Google Scholar

    [51] Jang H J, Yeo S, Yoh J J. Skin pre-ablation and laser assisted microjet injection for deep tissue penetration[J]. Lasers in Surgery and Medicine, 2017, 49(4): 387-394. doi: 10.1002/lsm.22608

    CrossRef Google Scholar

    [52] Ramachandran H, Dharmadhikari A K, Bambardekar K, et al. Optical-tweezer-induced microbubbles as scavengers of carbon nanotubes[J]. Nanotechnology, 2010, 21(24): 245102. doi: 10.1088/0957-4484/21/24/245102

    CrossRef Google Scholar

    [53] Luo Kaiyu, Lu Jinzhong, Zhang Lingfeng, et al. The microstructural mechanism for mechanical property of LY2 aluminum alloy after laser shock processing[J]. Materials & Design (1980-2015), 2010, 31(5): 2599-2603.

    Google Scholar

    [54] Babu N K, Raman S G S, Murthy C V S, et al. Effect of beam oscillation on fatigue life of Ti-6Al-4V electron beam weldments[J]. Materials Science and Engineering: A, 2007, 471(1-2): 113-119. doi: 10.1016/j.msea.2007.03.040

    CrossRef Google Scholar

    [55] 聂贵锋, 冯爱新, 任旭东, 等.激光冲击参数对2024铝合金冲击区域的主应力及其方向的影响[J].中国激光, 2012, 39(1): 0103006.

    Google Scholar

    Nie Guifeng, Feng Aixin, Ren Xudong, et al. Effect of laser shock processing parameters on residual principal stresses and its directions of 2024 aluminum alloy[J]. Chinese Journal of Lasers, 2012, 39(1): 0103006.

    Google Scholar

    [56] 罗新民, 苑春智, 张静文, 等.激光冲击及其对金属材料组织和性能的影响[J].热处理, 2012, 27(1): 17-22.

    Google Scholar

    Luo Xinmin, Yuan Chunzhi, Zhang Jingwen, et al. Laser shocking and its effects on microstructure and properties of metallic materials[J]. Heat Treatment, 2012, 27(1): 17-22.

    Google Scholar

    [57] Zhao Wenyue, Liu Yuzhuo, Liu Lei, et al. Surface recrystallization of a gamma-TiAl alloy induced by shot peening and subsequent annealing treatments[J]. Applied Surface Science, 2013, 270: 690-696. doi: 10.1016/j.apsusc.2013.01.129

    CrossRef Google Scholar

    [58] 王海将, 刘伟嵬, 余跃, 等.金属表面污染物的激光清洗研究现状与展望[J].内燃机与配件, 2016(8): 75-78.

    Google Scholar

    Wang Haijiang, Liu Weiwei, Yu Yue, et al. Research status and prospect of laser cleaning of metal surface contamination[J]. Internal Combustion Engine & Parts, 2016(8): 75-78.

    Google Scholar

    [59] Song W, Hong M, Lukiyanchuk B. Method and apparatus for cleaning surfaces: US, US 6777642 B2[P]. 2004.

    Google Scholar

    [60] 齐扬, 周伟强, 陈静, 等.激光清洗云冈石窟文物表面污染物的试验研究[J].安全与环境工程, 2015, 22(2): 32-38.

    Google Scholar

    Yang Qi, Zhou Weiqiang, Chen Jing, et al. Laser cleaning of contaminants on the surface of Yungang Grottoes[J]. Safety and Environmental Engineering, 2015, 22(2): 32-38.

    Google Scholar

    [61] Weng T S, Tsai C H. Laser-induced backside wet cleaning technique for glass substrates[J]. Applied Physics A, 2014, 116(2): 597-604. doi: 10.1007/s00339-013-8182-5

    CrossRef Google Scholar

    [62] Kim T H, Busnaina A, Park J G, et al. Nanoscale particle removal using wet laser shockwave cleaning[J]. ECS Journal of Solid Science and Technology, 2012, 1(2): P70-P77.

    Google Scholar

  • Abstract:Liquid-assisted laser machining (LALM) is a composite manufacturing technology. During liquid-assisted laser machining, the liquid has the functions of cooling and cleaning on the processing area. It makes the heat affected area of the work piece become smaller. The thermal stress is reduced, and the processing incision is smooth and cleaning. So the liquid-assisted laser machining has unique advantages in the processing of heat sensitive materials, high harden-brittle materials and materials of high precision requirements. Due to the addition of liquid in the laser processing, the laser interacts with the machined and the added working liquid. Some researchers have found that the pressure in the process of liquid-assisted laser machining is produced through the study of the experiments and simulation. The existence of pressure results in the complexity of the laser processing even the processing mechanism would be changed. Then the process is difficult to be controlled. Therefore the process of liquid-assisted laser machining should be detected. In order to better master and control this technology, many researchers have studied the existence of pressure in the process. And it has become a research hotspot in the field of laser composite processing. At present, most of the numerical simulation and experimental studies on the pulsation, shock wave, micro-jets and acoustic radiation of single bubble generated by single pulse laser are carried out. However, multi-bubble is usually produced in the process of liquid-assisted laser machining, which makes the phenomenon and the mechanism of laser processing become more complex. These complex phenomenon and mechanisms should be further explored and studied by researchers.

    In this paper, the research status of pressure of shock wave and high speed micro-jet in liquid assisted laser machining has been reviewed. The mechanism of pressure generation and the basic characteristics of pressure are briefly resumed in liquid-assisted laser machining, the effects of laser energy, liquid viscosity, liquid surface tension, liquid gas content and the distance of laser focus on solid surface are summarized. And the detection methods of the impact pressure, such as shock wave and micro-jet are mainly introduced in the process of liquid assisted laser machining. And the characteristics of the detection methods, such as photography technology, optical deflection measurement method, hydrophone detection method and high frequency piezoelectric sensor detection method are summarized. Many researchers usually use two or more detection methods to study the distribution of the pressure field, the direction of the shock wave and the micro-jets, and the variation of pressure. Finally, the applications of liquid-assisted laser machining in micro-nano manufacturing, biomedicine and surface treatment are introduced and the prospects of the technology are summarized.

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