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Xiaoyong Tian, Lixian Yin, Dichen Li. Current situation and trend of fabrication technologies for three-dimensional metamaterials[J]. Opto-Electronic Engineering, 2017, 44(1): 69-76. doi: 10.3969/j.issn.1003-501X.2017.01.006
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Current situation and trend of fabrication technologies for three-dimensional metamaterials
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Abstract
Three dimensional (3D) metamaterials are periodic artificial microstructures arranged in three-dimensional space. They are in scale of subwavelength, thus getting extraordinary physical properties which are not found in nature. The recent developments on basic theory and manufacturing process of the 3D metamaterials are discussed in this letter. Manufacturing processes of the 3D metamaterials are sorted out, including printing circuit board and assembly, machining technology, 3D printing technology, micro/nano-manufacturing technology. As the representative devices of 3D metamaterials, the electromagnetic cloaks, lens antennas, absorbers and flexible metamaterials are discussed to show how the 3D metamaterials control the electromagnetic-wave. Devices of left-handed metamaterials, graded refractive index metamaterials, intelligent metamaterials are also discussed. Finally, the development trends of 3D metamaterials in future are discussed and predicted according to the present problems of 3D metamaterials. -
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References
[1] Cui Tiejun, Smith D R, Liu Ruopeng. Metamaterials: theory, design and applications[M]. New York: Springer, 2010. [2] 崔万照, 马伟, 邱乐德, 等.电磁超介质及其应用[M].北京:国防工业出版社, 2008. Cui Wanzhao, Ma Wei, Qiu Lede, et al. Electromagnetic metamaterials and its applications[M]. Beijing: National Defense Industry Press, 2008. [3] 张明习.超材料概论[M].北京:国防工业出版社, 2014. Zhang Mingxi. Introduction to metamaterials[M]. Beijing: National Defense Industry Press, 2014. [4] Tang Wenxuan, Mei Zhonglei, Cui Tiejun. Theory, experiment and applications of metamaterials[J]. Science China Physics, Mechanics & Astronomy, 2015, 58(12): 127001. [5] Yoon G, Kim I, Rho J. Challenges in fabrication towards realization of practical metamaterials[J]. Microelectronic Engineering, 2016, 163: 7-20. doi: 10.1016/j.mee.2016.05.005 [6] Veselago V G. The electrodynamics of substances with simultaneously negative values of ɛ and μ[J]. Soviet Physics Uspekhi, 1968, 10(4): 509-514. doi: 10.1070/PU1968v010n04ABEH003699 [7] Shelby R A, Smith D R, Schultz S. Experimental verification of a negative index of refraction[J]. Science, 2001, 292(5514): 77-79. doi: 10.1126/science.1058847 [8] Smith D R, Mock J J, Starr A F, et al. Gradient index metamaterials[J]. Physical Review E, 2005, 71(3): 036609. doi: 10.1103/PhysRevE.71.036609 [9] Kafesaki M, Tsiapa I, Katsarakis N, et al. Left-handed metamaterials: the fishnet structure and its variations[J]. Physical Review B, 2007, 75(23): 235114. doi: 10.1103/PhysRevB.75.235114 [10] Zhou Jiangfeng, Economon E N, Koschny T, et al. Unifying approach to left-handed material design[J]. Optics Letters, 2006, 31(24): 3620-3622. doi: 10.1364/OL.31.003620 [11] Erfani E, Niroo-Jazi M, Tatu S. A high-gain broadband gradient refractive index metasurface lens antenna[J]. IEEE Transactions on Antennas and Propagation, 2016, 64(5): 1968-1973. doi: 10.1109/TAP.2016.2526052 [12] Smith D R, Mock J J, Starr A F, et al. Gradient index metamaterials[J]. Physical Review E, 2005, 71(3): 036609. doi: 10.1103/PhysRevE.71.036609 [13] Ma Huifeng, Cai Bengeng, Zhang Tengxiang, et al. Three- dimensional gradient-index materials and their applications in microwave lens antennas[J]. IEEE Transactions on Antennas and Propagation, 2013, 61(5): 2561-2569. doi: 10.1109/TAP.2012.2237534 [14] Soukoulis C M, Wegener M. Past achievements and future challenges in the development of three-dimensional photonic metamaterials[J]. Nature Photonics, 2011, 5(9): 523-530. doi: 10.1038/nphoton.2011.154 [15] Shelby R A, Smith D R, Schultz S. Experimental verification of a negative index of refraction[J]. Science, 2001, 292(5514): 77- 79. doi: 10.1126/science.1058847 [16] Landy N I, Sajuyigbe S, Mock J J, et al. Perfect metamaterial absorber[J]. Physical Review Letters, 2008, 100(20): 207402. doi: 10.1103/PhysRevLett.100.207402 [17] Sun Shulin, He Qiong, Xiao Shiyi, et al. Gradient-index meta-surfaces as a bridge linking propagating waves and surface waves[J]. Nature Materials, 2012, 11(5): 426-431. doi: 10.1038/nmat3292 [18] Schurig D, Mock J J, Justice B J, et al. Metamaterial electromagnetic cloak at microwave frequencies[J]. Science, 2006, 314(5801): 977-980. doi: 10.1126/science.1133628 [19] Ma Huifeng, Cui Tiejun. Three-dimensional broadband ground- plane cloak made of metamaterials[J]. Nature Communications, 2010, 1: 21. [20] Ma Huifeng, Cui Tiejun. Three-dimensional broadband and broad-angle transformation-optics lens[J]. Nature Communications, 2010, 1: 124. doi: 10.1038/ncomms1126 [21] Mei Zhonglei, Bai Jing, Cui Tiejun. Gradient index metamaterials realized by drilling hole arrays[J]. Journal of Physics D: Applied Physics, 2010, 43(5): 055404. doi: 10.1088/0022-3727/43/5/055404 [22] Driscoll T, Lipworth G, Hunt J, et al. Performance of a three dimensional transformation-optical-flattened Lüneburg lens[J]. Optics Express, 2012, 20(12): 13262-13273. doi: 10.1364/OE.20.013262 [23] Xu Xiaofei, Feng Yijun, Xiong Shuai, et al. Broad band invisibility cloak made of normal dielectric multilayer[J]. Applied Physics Letters, 2011, 99(15): 154104. doi: 10.1063/1.3648116 [24] Peng Liang, Ran Lixin, Chen Hongsheng, et al. Experimental observation of left-handed behavior in an array of standard dielectric resonators[J]. Applied Physics Letters, 2007, 98(15): 157403. doi: 10.1103/PhysRevLett.98.157403 [25] Zhao Qian, Kang Lei, Du B, et al. Experimental demonstration of isotropic negative permeability in a three-dimensional dielectric composite[J]. Applied Physics Letters, 2008, 101(2): 027402. doi: 10.1103/PhysRevLett.101.027402 [26] Lee J H, Blair J, Tamma V A, et al. Direct visualization of optical frequency invisibility cloak based on silicon nanorod array[J]. Optics Express, 2009, 17(15): 12922-12928. doi: 10.1364/OE.17.012922 [27] Blair J, Brown D, Tamma V A, et al. Challenges in the fabrication of an optical frequency ground plane cloak consisting of silicon nanorod arrays[J]. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2010, 28(6): 1222-1230. [28] Zhang Shuang, Zhou Jiangfeng, Park Y S, et al. Photoinduced handedness switching in terahertz chiral metamolecules[J]. Nature Communications, 2012, 3: 942. doi: 10.1038/ncomms1908 [29] Zhu Weiming, Liu Aiqun, Zhang Xuming, et al. Switchable magnetic metamaterials using micromachining processes[J]. Advanced Materials, 2011, 23(15): 1792-1796. doi: 10.1002/adma.201004341 [30] Tian Xiaoyong, Yin Ming, Li Dichen. 3D printing: a useful tool for the fabrication of artificial electromagnetic (EM) medium[J]. Rapid Prototyping Journal, 2016, 22(2): 251-257. [31] Ergin T, Stenger N, Brenner P, et al. Three-dimensional invisibility cloak at optical wavelengths[J]. Science, 2010, 328(5976): 337-339. doi: 10.1126/science.1186351 [32] Zhou Fan, Bao Yongjun, Cao Wei, et al. Hiding a realistic object using a broadband terahertz invisibility cloak[J]. Scientific Reports, 2011, 1: 78. doi: 10.1038/srep00078 [33] Yin Ming, Tian Xiaoyong, Han Haoxue, et al. Free-space carpet-cloak based on gradient index photonic crystals in metamaterial regime[J]. Applied Physics Letters, 2012, 100(12): 124101. doi: 10.1063/1.3696040 [34] 李涤尘, 贺健康, 田小永, 等.增材制造:实现宏微结构一体化制造[J].机械工程学报, 2013, 49(6): 129-135. Li Dichen, He Jiankang, Tian Xiaoyong, et al. Additive manufacturing: integrated fabrication of macro/microstructures[J]. Journal of Mechanical Engineering, 2013, 49(6): 129-135. [35] Yin Ming, Tian Xiaoyong, Wu Lingling, et al. A broadband and omnidirectional electromagnetic wave concentrator with gradient woodpile structure[J]. Optics Express, 2013, 21(16): 19082. doi: 10.1364/OE.21.019082 [36] Ye Dexin, Lu Ling, Joannopoulos J D, et al. Invisible metallic mesh[J]. Proceedings of the National Academy of Sciences of the United States of America, 2016, 113(10): 2568-2572. doi: 10.1073/pnas.1600521113 [37] Urzhumov Y, Landy N, Driscoll T, et al. Thin low-loss dielectric coatings for free-space cloaking[J]. Optics Letters, 2013, 38(10): 1606-1608. doi: 10.1364/OL.38.001606 [38] Pendry J B, Schurig D, Smith D R. Controlling electromagnetic fields[J]. Science, 2006, 312(5781): 1780-1782. doi: 10.1126/science.1125907 [39] Cai Wenshan, Chettiar U K, Kildishev A V, et al. Optical cloaking with metamaterials[J]. Nature Photonics, 2007, 1(4): 224-227. doi: 10.1038/nphoton.2007.28 [40] Li J, Pendry J B. Hiding under the carpet: a new strategy for cloaking[J]. Physical Review Letters, 2008, 101(20): 203901. doi: 10.1103/PhysRevLett.101.203901 [41] Pendry J B. Negative refraction makes a perfect lens[J]. Physical Review Letters, 2000, 85(18): 3966-3969. doi: 10.1103/PhysRevLett.85.3966 [42] Leonhardt U. Notes on conformal invisibility devices[J]. New Journal of Physics, 2006, 8(7): 118. doi: 10.1088/1367-2630/8/7/118 [43] Luneburg R K. Mathematical theory of optics[M]. Berkeley, California: University of California Press, 1964. [44] Danner A J, Tyc T, Leonhardt U. Controlling birefringence in dielectrics[J]. Nature Photonics, 2011, 5(6): 357-359. doi: 10.1038/nphoton.2011.53 [45] Ma Yungui, Ong C K, Tyc T, et al. An omnidirectional retroreflector based on the transmutation of dielectric singularities[J]. Nature Materials, 2009, 8(8): 639-642. doi: 10.1038/nmat2489 [46] Yin Ming, Tian Xiaoyong, Wu Lingling, et al. All-dielectric three-dimensional broadband Eaton lens with large refractive index range[J]. Applied Physics Letters, 2014, 104(9): 094101. doi: 10.1063/1.4867704 [47] Wu Lingling, Tian Xiaoyong, Yin Ming, et al. Three-dimensional liquid flattened Luneburg lens with ultra-wide viewing angle and frequency band[J]. Applied Physics Letters, 2013, 103(8): 084102. doi: 10.1063/1.4819338 [48] Wang Bingnan, Koschny T, Soukoulis C M. Wide-angle and polarization-independent chiral metamaterial absorber[J]. Physical Review B, 2009, 80(3): 033108. doi: 10.1103/PhysRevB.80.033108 [49] Ding Fei, Cui Yanxia, Ge Xiaochen, et al. Ultra-broadband microwave metamaterial absorber[J]. Applied Physics Letters, 2012, 100(10): 103506. doi: 10.1063/1.3692178 [50] Hawkes A M, Katko A R, Cummer S A. A microwave metamaterial with integrated power harvesting functionality[J]. Applied Physics Letters, 2013, 103(16): 163901. doi: 10.1063/1.4824473 [51] Cheng Qiang, Cui Tiejun, Jiang Weixiang, et al. An omnidirectional electromagnetic absorber made of metamaterials[J]. New Journal of Physics, 2010, 12(6): 063006. doi: 10.1088/1367-2630/12/6/063006 [52] Narimanov E E, Kildishev A V. Optical black hole: broadband omnidirectional light absorber[J]. Applied Physics Letters, 2009, 95(4): 041106. doi: 10.1063/1.3184594 [53] Shin D, Urzhumov Y, Jung Y, et al. Broadband electromagnetic cloaking with smart metamaterials[J]. Nature Communications, 2012, 3: 1213. doi: 10.1038/ncomms2219 [54] Shin D, Urzhumov Y, Lim D, et al. A versatile smart transformation optics device with auxetic elasto-electromagnetic metamaterials[J]. Scientific Reports, 2014, 4: 4084. [55] Kan T, Isozaki A, Kanda N, et al. Enantiomeric switching of chiral metamaterial for terahertz polarization modulation employing vertically deformable MEMS spirals[J]. Nature Communication, 2015, 6: 8422. doi: 10.1038/ncomms9422 [56] Ni Xingjie, Wong Z J, Mrejen M, et al. An ultrathin invisibility skin cloak for visible light[J]. Science, 2015, 349(6254): 1310-1314. doi: 10.1126/science.aac9411 [57] Yoo Y J, Ju S, Park S Y, et al. Metamaterial absorber for electromagnetic waves in periodic water droplets[J]. Scientific Reports, 2015, 5: 14018. doi: 10.1038/srep14018 -
Overview
Abstract: Three dimensional (3D) metamaterials are artificial micro-structures periodically arranged in three-dimensional space. The lattice constant of metamaterial is much smaller than the wavelength of the incident EM wave, so the metamaterial can be treated as an artificial effective medium for the propagating of the EM waves. By controlling the geometrical parameters of its lattice, the metamaterials can be developed with properties never found in nature, which can be utilized to manipulate the propagation of EM waves, such as blocking, absorbing, capturing, or bending waves. With these magic properties, 3D metamaterials get bright prospects for applications in stealth technology, communication technology, optical imaging and sensing technology.
The principles for metamaterials are firstly discussed. There are two kinds of metamaterials with difference in the electromagnetic responses. They are metallic resonant metamaterials and dielectric non-resonant metamaterials. Metallic resonant metamaterials are normally constructed by split-ring resonator, metal continuous line, metal break line and so on, to get negative effective permeability and negative permittivity by magnetic and electric resonance. Non-resonant dielectric metamaterials obtain their arbitrary permeability and permittivity by specific distribution of the dielectric materials.
The recent developments of the structure design and manufacturing process in 3D metamaterials are sorted out, which include printing circuit board and assembly technology, machining and assembly technology, micro-nano manufacturing technology and 3D printing technology. Printing circuit board and assembly technology are suitable for metallic resonant metamaterials. Machining and assembly technology are fit for dielectric non-resonant microwave metamaterials. Micro/nano-manufacturing technology can be used to fabricate simple and small scale optical metamaterials. 3D printing technology can be used in fabricating metamaterials from gigahertz to terahertz, and its process capability in fabricating complex micro and macro-structure is very useful for metamaterials.
The representative devices of 3D metamaterials are also discussed to show how the 3D metamaterials control the electromagnetic-wave, including electromagnetic cloaks, lens antennas, absorbing structure and flexible metamaterials. According to the problems in manufacturing process and structure innovation, several developments trends have been predicted, such as trans-scale manufacturing technology for complex micro/macro-structure, multi/material manufacturing technology, manufacturing technology for multi-function coupling structures, smart metamaterials design and fabricating with 4D printing technology etc.
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Xiaoyong Tian, Lixian Yin, Dichen Li. Current situation and trend of fabrication technologies for three-dimensional metamaterials[J]. Opto-Electronic Engineering, 2017, 44(1): 69-76. doi: 10.3969/j.issn.1003-501X.2017.01.006
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