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【With the same author name:【Minggang Liu】 Found 1 articles】 /Page Order by: Asce Desc

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Plasmonic lithography with 100 nm overlay accuracy

Minggang Liu, Chengwei Zhao, Yan Tang, et al

In this paper, we demonstrate an auto accurate alignment method to align mask-substrate in the prototype of plasmonic lithography (PL), which is essential to multilayer nanostructure fabri...

First published at: Feb 15, 2017

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doi:10.3969/j.issn.1003-501X.2017.02.010

Opto-Electronic Engineering, Vol. 44, Issue 02, pp. 209 - 215

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