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【With the same author name:【Minggang Liu】 Found 1 articles】
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Article
Plasmonic lithography with 100 nm overlay accuracy
Minggang Liu
,
Chengwei Zhao
,
Yan Tang
, et al
In this paper, we demonstrate an auto accurate alignment method to align mask-substrate in the prototype of plasmonic lithography (PL), which is essential to multilayer nanostructure fabri...
First published at: Feb 15, 2017
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ESI
doi:
10.3969/j.issn.1003-501X.2017.02.010
Opto-Electronic Engineering
, Vol. 44, Issue 02
, pp. 209 - 215
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