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A highly sensitive cantilever temperature sensor for small-area heat source temperature measurement
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摘要:
本文利用材料热膨胀系数不同的性质设计了一种可以对小面积热源进行高灵敏检测的温度传感器。该传感器的温度敏感元件是一个上表面镀有金属的氮化硅悬臂梁。由于金属与氮化硅的热膨胀系数不同，因此当悬臂梁所在的环境温度发生变化时，悬臂梁会向温度梯度变化快的方向发生弯曲，并且弯曲量与温度成正相关关系。实验中通过光杠杆测量梁的弯曲量，用标定的方式建立温度与探测器输出电压之间的关系。结果显示，该传感器的灵敏度可以达到4.86 mV/℃，以及0.04 ℃的温度分辨力。为验证传感器对小面积热源进行测量的适用性，我们利用NaYF4材料受激发热的性质，对不同面积热源产生的热量进行测量。结果显示，当发热面积约为0.07 mm2时依然可以进行准确测量，实现了对小面积热源温度进行精确测量的目的。
Abstract:In this paper, a kind of temperature sensor which can detect a small-area heat source with high sensitivity is designed by using the property of different thermal expansion coefficients of materials. The temperature sensitive element of the sensor is a silicon nitride cantilever beam which is coated with metal on its upper surface. Due to the difference of thermal expansion coefficients between the metal and silicon nitride, the cantilever beam will bend in the direction of rapid change of the temperature gradient, and the bending amount will be positively correlated with the temperature when the ambient temperature of the cantilever beam changes. In the experiment, the bending amount of the beam is measured by the optical lever, and the relationship between the temperature and the output voltage of the detector is established by calibration. The results show that the sensitivity of the sensor can reach 4.86 mV/℃ and the temperature resolution can reach 0.04 ℃. In order to verify the applicability of the sensor for measuring the small-area heat source, the heat generated by heat sources of different areas is measured depending on the calorific property of NaYF4 under laser excitation. The results show that it still can be measured even the heating area is only 0.07 mm2 and the accurate measurement for temperature of the small-area heat source can be realized.
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Key words:
- temperature sensor /
- bi-material cantilever /
- thermal expansion /
- NaYF4
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Overview: High-precision and high-sensitivity temperature sensors are indispensable tools for material processing and biological cell research. For example, the temperature generated from biochemical reactions is a crucial indicator in the research of drugs in cells. However, the drug produces less heat through biochemical reactions in cells, and the cell volume is limited. Furthermore, the existing temperature sensor can only give a rough temperature range when measuring a very small heat source, so the high-sensitivity and high-precision measurement purpose cannot be achieved. Therefore, it requires a method that can accurately measure small-area heat sources. A static temperature sensor of non-contact cantilever beam is designed to measure the temperature of small-area heat sources and simplify the system design. The temperature sensitive element of the sensor is a silicon nitride cantilever beam which is coated with metal on its upper surface. Due to the difference of thermal expansion coefficients between metal and silicon nitride, the cantilever beam will bend in the direction where the temperature gradient changes rapidly when the ambient temperature of the cantilever beam changes, and the bending amount is measured by optical lever. The relationship between the temperature and the output voltage of the detector can be established by converting the bending amount into electrical signals with the detector. Through the theoretical analysis, the result shows that the bending amount is positively correlated with the change of temperature. Under the laboratory conditions, the relationship between the detector output voltage and the standard temperature can be established as y = 4.8603x - 116.36 by calibration. The goodness of fit is greater than 0.99, the sensitivity is 4.86 mV/℃, and the temperature resolution is 0.04 ℃. To verify the applicability of this method for measuring small-area heat sources, we used the property of the NaYF4 material that can generate heat when excited by laser. We also set up heat sources with different areas and measure the heat generated by the heat source. The results show that it still can be measured even the heating area is only 0.07 mm2. Finally, we prove the correctness of the experimental results by analyzing the relationship between the spectrum of the excited emission of NaYF4 and temperature. Thereby, the purpose of accurately measuring the temperature of the small-area heat source is realized.
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图 1 (a) 双材料悬臂梁结构示意图；(b)梁受热弯曲示意图。由于上下层材料的热膨胀系数存在差异，所以当温度发生变化时梁会产生一定幅度的弯曲
Figure 1. (a) Diagram of bi-material cantilever beam structure; (b) Diagram of beam bending under heating. Due to the difference in thermal expansion coefficient between metal and SiNx, the beam will bend when the temperature changes
图 2 不同镀层的双材料悬臂梁厚度比n=t1/t2对传感器灵敏度Sr的影响。红色虚线为Au-SiNx的理论灵敏度，蓝色实线为Al-SiNx的理论灵敏度
Figure 2. Effect of bi-material thickness ratio, n=t1/t2, on the sensor sensitivity Sr. The red line are the prediction data for the Au-SiNx sensor, and the blue line are the prediction data for the Al-SiNx sensor
图 3 光杠杆测量悬臂梁弯曲量的原理图
Figure 3. Schematic diagram of optical lever measurement for the bending amount of cantilever
图 4 (a) 测温实验装置结构示意图；(b) 1为悬臂梁温度传感器实验装置图，2为探测激光在梁尖端的聚焦光斑，3为显微镜下观察到的NaYF4
Figure 4. (a) Schematic diagram of temperature measuring device; (b) 1. Experimental device diagram, 2. The focused spot of the laser on the beam tip, 3. NaYF4 observed under the microscope
图 5 (a) 蓝色散点为1 h内探测器输出的信号，红线为满足3δ原则时的输出电压范围；(b)探测器输出信号的噪声密度谱
Figure 5. (a) The blue scatter is the signal output by the detector within 1 hour. The red line is the output voltage range that satisfies the 3δ principle; (b) Noise density spectrum of the detector output signal
图 6 调节电阻发热量，对每个测温点多次测量的结果计算平均值，并对测量曲线用一次函数拟合
Figure 6. Adjust the calorific value of the resistance, calculate the average value of the results of multiple measurements at each temperature measuring point, and fit the measurement curve with a function
图 7 激发功率密度为1.12 mW/mm2时，热成像仪对每个面积下纳米材料发热情况的测量结果图
Figure 7. Thermal images of the nanomaterial with different areas when the excitation power is 1.12 mW/mm2
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