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Overview: The spectrum can reflect the molecular structure information of substances and plays an important role in the fields of biology, chemistry, pharmaceutical materials, food industry and geological exploration. With the development of science and technology, a large number of frontier disciplines cross, infiltrate and fuse. A series of requirements that include wide spectrum, high resolution and miniaturization of spectrometer are proposed, thus the micro spectrometer has been concerned tremendously. Nowadays, the spectrometer has many light path structures. Czerny-Turner light path structure not only avoids the secondary or multiple diffraction, but also facilitates the optical element processing and the loading. It has a wide measuring range, simple structure, low cost and so on, so it is widely used in micro spectrometer. In recent years, researchers at home and abroad have done a lot of researches on the design and performance of micro-spectrometer. However, the resolution of spectrometer is generally more than 0.3 nm, which cannot meet some areas with high resolution. When researchers detect imaging spectrum in the atmosphere in the edge, the spectrometer shall have a high resolution of 0.06 nm~0.08 nm, owing to the kinds of particles in the atmosphere and multi-component and the atmospheric humidity. In the determination of impurity elements in steel, the determination of other elements is caused by spectral interference when it exists in the matrix elements, owing to the complexity of impurity element spectrum and various spectral lines. In this case, a high resolution of the spectrometer is highly desired. In addition, the small-volume spectrometer is portable, making it more convenient for police departments to detect drugs, law enforcement departments to detect factory sewage and geologists to detect mineral composition on the spot.
We used Zemax (optical design software) to choose the initial structure parameters and evaluation function to automatically optimize angle and distance of focus lens, cylindrical lens and CCD to design an optical system of spectrometer of Czerny-Turner structure, whose resolution is better than 0.05 nm. Its numerical aperture is 0.1, and the volume of the system is 90 mm×130 mm×40 mm. On this basis, eight grating slanting angles were optimized, and the spectral resolution of the micro-spectrometer is better than 0.05 nm, while the band range reaches 820 nm~980 nm. The spectrometer has the characteristics of high resolution, wide spectrum and small volume.
The CT optical path structure of M-type
The optimized optical path diagram
The separated points at the wavelength of 881 nm, 889 nm and 897 nm
The optimized spot Y curve
The optimized MTF curves
Spot diagrams with intervals of 20 nm, 30 nm, 40 nm and 50 nm